MEMS-based shear characterization of soft hydrated samples

Journal of Micromechanics and Microengineering

Volumn 23, Issue 8, 2013, Pages

  Higgs, Gadryn C ^a,b   Simmons, Chelsey S ^a,b   Gao, Yingning ^a   Fried, Andrew T ^a   Park, Sung Jin ^a   Chung, Cindy ^a   Pruitt, Beth L ^a,b  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE (AFM); CHARACTERIZATION METHODS; COMB-DRIVE ACTUATOR; HEXAMETHYL DISILOXANE; SHEAR PROPERTIES; SOFT SUBSTRATES; SYNTHETIC MATERIALS; WATER CONTACT ANGLE;

ACTUATORS; ATOMIC FORCE MICROSCOPY; BIOLOGICAL MATERIALS; CHEMICAL VAPOR DEPOSITION; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; HYDRATION; SILICONES; STIFFNESS;

CHARACTERIZATION;

EID: 84881137632     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/085001     Document Type: Article

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