Hydrophobic plasma polymerized hexamethyldisilazane thin films: Characterization and uses

Materials Research

Volumn 9, Issue 1, 2006, Pages 9-13

  De Carvalho, Alexsander Tressino ^a   Carvalho, Rodrigo Amorim Motta ^a   Da Silva, Maria Lúcia Pereira ^a   Demarquette, Nicole Raymond ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Plasma polymerization; Sensor membrane; Surface protection

Indexed keywords

ADHESION; ADSORPTION; HYDROPHOBICITY; PLASMA ETCHING; PLASMA POLYMERIZATION; SENSORS; SUBSTRATES; SURFACE PROPERTIES;

ADSORPTION PROPERTIES; HEXAMETILDISILAZANE (HMDS); PLASMA POLYMERIZED THIN FILMS; SENSOR MEMBRANE; SURFACE PROTECTION; SURFACES HYDROPHOBICITY;

THIN FILMS;

EID: 33645825662     PISSN: 15161439     EISSN: 15161439     Source Type: Journal    
DOI: 10.1590/s1516-14392006000100003     Document Type: Article

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