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Volumn 52, Issue 4 PART 2, 2013, Pages

Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition

(9) Ueno, Kazuyoshi a Karasawa, Yusuke a Kuwahara, Satoru a Baba, Shotaro a Hanai, Hitoshi a Yamazaki, Yuichi b Sakuma, Naoshi b Kajita, Akihiro b Sakai, Tadashi b

a SHIBAURA INSTITUTE OF TECHNOLOGY (Japan)

b Low power Electronics Association and Project LEAP (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITIONS (CVD); GRAPHITE FORMATION; HIGH TEMPERATURE; INTERCONNECT MATERIALS; MULTILAYER GRAPHENE; NANOSCALE INTERCONNECTS; PRACTICAL METHOD; WITHOUT AGGLOMERATION;

AGGLOMERATION; CATALYSTS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; GRAPHENE; METALS; MULTILAYERS; SOLID STATE DEVICES; VAPORS;

COBALT;

EID: 84880838833 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.7567/JJAP.52.04CB04 Document Type: Conference Paper

Times cited : (6)

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