Effects of hydrogen in the cooling step of chemical vapor deposition of graphene

Electronic Materials Letters

Volumn 9, Issue 4, 2013, Pages 417-420

  Kim, Hyeji ^a   Kim, Eunho ^a   Lee, Won Jun ^a   Jung, Jongwan ^a  

^a Sejong University   (South Korea)

Author keywords

cooling step; CVD; graphene; hydrocarbon; hydrogen

Indexed keywords

CVD-GROWN GRAPHENE; GRAPHENE FILMS; HYDROCARBON SOURCES; HYDROGEN FLOW RATE; HYDROGEN GAS; METHANE GAS;

CHEMICAL VAPOR DEPOSITION; FLOW RATE; GRAPHENE; HYDROCARBONS; HYDROGEN; METHANE;

COOLING;

EID: 84880444126     PISSN: 17388090     EISSN: 20936788     Source Type: Journal    
DOI: 10.1007/s13391-013-0017-1     Document Type: Article

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