Improved thermal behavior of multiple linked arrays of silicon nanowires integrated into planar thermoelectric microgenerators

Journal of Electronic Materials

Volumn 42, Issue 7, 2013, Pages 1918-1925

  Dávila, Diana ^a   Tarancón, Albert ^b   Calaza, Carlos ^a   Salleras, Marc ^a   Fernández Regúlez, Marta ^a   Paulo, Alvaro San ^c   Fonseca, Luis ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b CATALONIA INSTITUTE FOR ENERGY RESEARCH IREC   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

energy harvesting; Silicon nanowires; thermoelectric microgenerators; thermoelectricity

Indexed keywords

CHEMICAL VAPOR DEPOSITIONS (CVD); LOW-DIMENSIONAL STRUCTURES; MICROGENERATORS; SILICON NANOWIRES; SILICON-ON-INSULATOR SUBSTRATES; THERMOELECTRIC GENERATORS; THERMOELECTRIC PROPERTIES; VAPOR-LIQUID-SOLID MECHANISM;

CHEMICAL VAPOR DEPOSITION; ENERGY HARVESTING; MICROFABRICATION; NANOWIRES; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; VAPORS;

SILICON;

EID: 84879796293     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-013-2470-x     Document Type: Article

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