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Volumn 87, Issue 5-8, 2010, Pages 1294-1296

Membrane-less in-plane bulk-micromachined thermopiles for energy harvesting

Author keywords

Bulk micromachining; Energy harvester; Membrane less; Polysilicon; Stress; Thermopiles

Indexed keywords

BULK- MICROMACHINING; BULK-MICROMACHINED; COLD SIDE; CONTACT LITHOGRAPHY; ENERGY HARVESTER; GENERIC PROCESS; HEAT FLOWS; HEAT SOURCES; IN-PLANE; LOW COSTS; LOW STRESS; LOW TEMPERATURES; MEMBRANE SUPPORTS; POLY-SI; POLY-SIGE; PROCESS DEVELOPMENT; SI WAFER; SILICON NITRIDE MEMBRANE;

EID: 76949106653     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.10.003     Document Type: Article
Times cited : (10)

References (9)
  • 1
    • 76949088148 scopus 로고    scopus 로고
    • Patent EP1976034
    • Patent EP1976034.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.