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Volumn 87, Issue 5-8, 2010, Pages 1294-1296
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Membrane-less in-plane bulk-micromachined thermopiles for energy harvesting
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Author keywords
Bulk micromachining; Energy harvester; Membrane less; Polysilicon; Stress; Thermopiles
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Indexed keywords
BULK- MICROMACHINING;
BULK-MICROMACHINED;
COLD SIDE;
CONTACT LITHOGRAPHY;
ENERGY HARVESTER;
GENERIC PROCESS;
HEAT FLOWS;
HEAT SOURCES;
IN-PLANE;
LOW COSTS;
LOW STRESS;
LOW TEMPERATURES;
MEMBRANE SUPPORTS;
POLY-SI;
POLY-SIGE;
PROCESS DEVELOPMENT;
SI WAFER;
SILICON NITRIDE MEMBRANE;
COMPOSITE MICROMECHANICS;
ELECTRIC BATTERIES;
HARVESTERS;
HARVESTING;
MECHANICAL PROPERTIES;
MECHANICAL STABILITY;
MEMBRANE STRUCTURES;
MICROMACHINING;
POLYSILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON NITRIDE;
SILICON OXIDES;
SILICON WAFERS;
TERNARY SYSTEMS;
THERMOPILES;
ENERGY HARVESTING;
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EID: 76949106653
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2009.10.003 Document Type: Article |
Times cited : (10)
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References (9)
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