Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Surface and Coatings Technology

Volumn 228, Issue SUPPL.1, 2013, Pages

  Bulíř, Jiří ^a   Novotný, Michal ^a   Lančok, Ján ^a   Fekete, Ladislav ^a   Drahokoupil, Jan ^a   Musil, Jindřich ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

In situ monitoring; Magnetron sputtering; Spectral ellipsometry; Ultrathin silver

Indexed keywords

DEPOSITION CONDITIONS; ELECTRICAL MONITORING; EXTINCTION COEFFICIENTS; IN-SITU MONITORING; RF-MAGNETRON SPUTTERING; SPECTRAL ELLIPSOMETRY; ULTRA-THIN; VISIBLE SPECTRAL RANGE;

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; NITROGEN; NUCLEATION; X RAY DIFFRACTION;

SILVER;

EID: 84879795756     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.08.021     Document Type: Article

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