MOEMS tunable microlens made of aluminum nitride membranes

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 12, Issue 2, 2013, Pages

  Leopold, Steffen ^a   Polster, Tobias ^a   Paetz, Daniel ^a   Knoebber, Fabian ^b   Ambacher, Oliver ^b   Sinzinger, Stefan ^a   Hoffmann, Martin ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

Author keywords

aluminum nitride; bulge test; creep; membrane; microlens; MOEMS; residual stress; tunable

Indexed keywords

CREEP; MEMBRANES; MICROLENSES; MOEMS; RESIDUAL STRESSES;

ALUMINUM NITRIDE LAYER; ALUMINUM NITRIDE MEMBRANES; BULGE TESTS; DEFLECTION PROFILES; EXTERNAL PRESSURES; LONG TERM STABILITY; MICRO-LENS; TUNABLE;

ALUMINUM NITRIDE;

EID: 84879532461     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.JMM.12.2.023012     Document Type: Article

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