A MEMS-based variable micro-lens system

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Krogmann, F ^a   Monch W ^a   Zappe, H ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Centring structure; Electro wetting; Liquid lens; Micro lens; Micro opto electro mechanical systems; Optical fluids; Silicon technology; Variable lens

Indexed keywords

ACTUATORS; ANISOTROPY; ETCHING; MICROOPTICS; OPTICAL INSTRUMENT LENSES; SILICON ON INSULATOR TECHNOLOGY; VOLTAGE CONTROL;

CENTRING STRUCTURE; ELECTRO-WETTING; LIQUID LENS; OPTICAL FLUIDS; SILICON TECHNOLOGY; VARIABLE LENS;

MICROELECTROMECHANICAL DEVICES;

EID: 33745184423     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S06     Document Type: Article

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