SCOPUS 정보 검색 플랫폼

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

Fabrication of a fluidic membrane lens system

(5) Draheim, J a Schneider, F a Kamberger, R a Mueller, C a Wallrabe, U a

a UNIVERSITY OF FREIBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLED SYSTEM; FABRICATION PROCESS; FOCAL LENGTHS; HOMOGENEOUS MEMBRANE; HOT-EMBOSSING; LENS SYSTEMS; MEMBRANE THICKNESS; OPTICAL UNITS; PIEZOELECTRIC PUMPING; PUMPING UNIT; RESPONSE TIME; VOLUME SHRINKAGE;

FABRICATION; LENSES; OPTICAL INSTRUMENTS; PUMPS; SILICONES;

MEMBRANES;

EID: 70350647348 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/19/9/095013 Document Type: Article

Times cited : (31)

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