SCOPUS 정보 검색 플랫폼

Volumn 111, Issue , 2013, Pages 14-20

Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

(4) Kikuchi, Tatsuya a Wachi, Yuhta a Sakairi, Masatoshi a Suzuki, Ryosuke O a

a HOKKAIDO UNIVERSITY (Japan)

Author keywords

Aluminum; Anodizing; Bulk micromachining; Electrochemical etching; Laser irradiation

Indexed keywords

ALUMINUM SUBSTRATE; ANODIC OXIDE FILM; ANODIZED ALUMINUM; BULK- MICROMACHINING; ETHANOL SOLUTIONS; INSULATING PROPERTIES; OXALIC ACID SOLUTION; ULTRA-SONICATION;

ALUMINUM; COMPOSITE MICROMECHANICS; ELECTROCHEMICAL ETCHING; FABRICATION; LASER BEAM EFFECTS; MICROCHANNELS; MICROMACHINING; ORGANIC ACIDS; OXIDE FILMS;

ANODIC OXIDATION;

EID: 84879121488 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.05.007 Document Type: Article

Times cited : (31)

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