Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

Microsystem Technologies

Volumn 19, Issue 2, 2013, Pages 211-218

  Li, Junhong ^a   Wang, Chenghao ^a   Ma, Jun ^a   Liu, Mengwei ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

II-VI SEMICONDUCTORS; LEAD ZIRCONATE TITANATE; MICROMACHINING; OXIDE MINERALS; SOL-GEL PROCESS; SOL-GELS; TITANIUM COMPOUNDS; TRANSDUCERS; WET ETCHING; ZINC OXIDE;

ETCHING METHOD; LEAD-ZIRCONATE-TITANATE FILMS; MEASURED RESULTS; MICRO-MACHINED ULTRASONIC TRANSDUCER; MODIFIED SOL-GEL METHOD; PREFERENTIAL ORIENTATION; SACRIFICIAL LAYER; SILICON MICROMACHINING;

ULTRASONIC TRANSDUCERS;

EID: 84878534867     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1719-2     Document Type: Article

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