Dissipative particle dynamics simulations to optimize contact hole shrink process using graphoepitaxial directed self-assembly

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Sato, Hironobu ^a   Yonemitsu, Hiroki ^a   Seino, Yuriko ^a   Kato, Hirokazu ^a   Kanno, Masahiro ^a   Kobayashi, Katsutoshi ^a   Kawanishi, Ayako ^a   Kodera, Katsuyoshi ^a   Azuma, Tsukasa ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Contact hole shrink process; Directed self assembly (DSA); Dissipative particle dynamics (DPD) simulations; Three dimensional configuration of block copolymer

Indexed keywords

CONTACT HOLES; DIRECTED SELF-ASSEMBLY; DISSIPATIVE PARTICLE DYNAMICS; DISSIPATIVE PARTICLE DYNAMICS SIMULATION; DPD SIMULATIONS; RESIDUAL LAYERS; SHRINK PROCESS; TRADE-OFF RELATIONSHIP;

BLOCK COPOLYMERS; ESTERS; OPTIMIZATION; SELF ASSEMBLY; SHRINKAGE; STYRENE; THREE DIMENSIONAL;

THREE DIMENSIONAL COMPUTER GRAPHICS;

EID: 84878386431     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2009622     Document Type: Conference Paper

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