Dissipative particle dynamics study on directed self-assembly in holes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Nakano, T ^a   Matsukuma, M ^a   Matsuzaki, K ^a   Muramatsu, M ^a   Tomita, T ^a   Kitano, T ^a  

^a TOKYO ELECTRON LTD   (Japan)

Author keywords

Block copolymer; Directed self assembly; Dissipative particle dynamics simulation; DSA; Hole shrink

Indexed keywords

DIRECTED SELF-ASSEMBLY; DISSIPATIVE PARTICLE DYNAMICS; DISSIPATIVE PARTICLE DYNAMICS SIMULATION; DSA; GUIDE WALLS; HOLE SHRINK; POLYMER SPECIES; UNDERLAYERS;

BLOCK COPOLYMERS; CYLINDERS (SHAPES); FREE ENERGY; POLYMERS; SELF ASSEMBLY;

CYLINDER CONFIGURATIONS;

EID: 84878391204     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011069     Document Type: Conference Paper

References (7)

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