SCOPUS 정보 검색 플랫폼

Journal of Physics D: Applied Physics

Volumn 46, Issue 21, 2013, Pages

Pulsed laser deposition of thin carbon films in a neutral gas background

(9) Guzman F a Favre, M a Ruiz, H M a Hevia, S a Caballero, L S a Wyndham, E S a Bhuyan, H a Flores, M b Mandl S c

a PONTIFICIA UNIVERSIDAD CATÓLICA DE CHILE (Chile)

b DEPARTAMENTO DE FÍSICA (Chile)

c LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; CARBON PLASMAS; FARADAY CUPS; FAST RESPONSE; FILM DEPOSITION; HIGH-CONTENT; ION ENERGIES; THIN CARBON FILMS;

AMORPHOUS CARBON; ARGON; LASER BEAMS; LASER PRODUCED PLASMAS; PLASMA INTERACTIONS; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY;

CARBON FILMS;

EID: 84878233414 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/46/21/215202 Document Type: Article

Times cited : (19)

References (46)

1
- 0003592140
- Chrisey D B and Hubler G K 1994 Pulsed Laser Deposition of Thin Films (New York: Wiley)
- (1994) Pulsed Laser Deposition of Thin Films
- Chrisey, D.B.¹ Hubler, G.K.²

2
- 84889301411
- Eason R 2007 Pulsed Laser Deposition of Thin Films: Applications-led Growth of Functional Materials (New York: Wiley)
- (2007) Pulsed Laser Deposition of Thin Films: Applications-led Growth of Functional Materials
- Eason, R.¹

3
- 0029253629
- 10.1016/0169-4332(94)00368-8 0169-4332
- Lunney J G 1995 Appl. Surf. Sci. 86 79
- (1995) Appl. Surf. Sci. , vol.86 , pp. 79
- Lunney, J.G.¹

4
- 0038764210
- Pulsed laser deposition of metals in low pressure inert gas
- DOI 10.1016/S0169-4332(99)00407-9
- Sturm K, Fähler S and Krebs H-U 2000 Appl. Surf. Sci. 1554-15 462 (Pubitemid 30573132)
- (2000) Applied Surface Science , vol.154 , pp. 462-466
- Sturm, K.¹ Fahler, S.² Krebs, H.-U.³

5
- 0036432867
- Large area PLD of nanometer-multilayers
- DOI 10.1016/S0169-4332(02)00320-3, PII S0169433202003203
- Dietsch R, Holz T, Weibach D and Scholz R 2002 Appl. Surf. Sci. 197-198 169 (Pubitemid 35348803)
- (2002) Applied Surface Science , vol.197-198 , pp. 169-174
- Dietsch, R.¹ Holz, Th.² Weissbach, D.³ Scholz, R.⁴

6
- 0035156190
- 2 thin films prepared by pulsed laser deposition
- DOI 10.1016/S0040-6090(00)01750-8
- Yoshitake T, Nagamoto T and Nagayama K 2001 Thin Solid Films 381 236 (Pubitemid 32093302)
- (2001) Thin Solid Films , vol.381 , Issue.2 , pp. 236-243
- Yoshitake, T.¹ Nagamoto, T.² Nagayama, K.³

7
- 54549113347
- 10.1007/s00339-008-4703-z 0947-8396 A
- Valerini D, Caricato A P, Lomascolo M, Romano F, Taurino A, Tunno T and Martino M 2008 Appl. Phys. A 93 729
- (2008) Appl. Phys. , vol.93 , pp. 729
- Valerini, D.¹ Caricato, A.P.² Lomascolo, M.³ Romano, F.⁴ Taurino, A.⁵ Tunno, T.⁶ Martino, M.⁷

8
- 84878234101
- 0022-2453 128986
- Krishnan R et al 2013 J. Mater. 2013 128986
- (2013) J. Mater. , vol.2013
- Krishnan, R.¹

9
- 77955878783
- 10.1063/1.3463204 0021-8979 034322
- Riabinina D, Irissou E, Le Drogoff B, Chaker M and Guay D 2010 J. Appl. Phys. 108 034322
- (2010) J. Appl. Phys. , vol.108
- Riabinina, D.¹ Irissou, E.² Le Drogoff, B.³ Chaker, M.⁴ Guay, D.⁵

10
- 0036835772
- Influence of inert gas pressure on deposition rate during pulsed laser deposition
- DOI 10.1007/s00339-002-1442-4
- Scharf T and Krebs H U 2002 Appl. Phys. A 75 551 (Pubitemid 34974029)
- (2002) Applied Physics A: Materials Science and Processing , vol.75 , Issue.5 , pp. 551-554
- Scharf, T.¹ Krebs, H.U.²

11
- 36249031907
- Pulsed laser deposition of multiwalled carbon nanotubes thin films
- DOI 10.1016/j.apsusc.2007.08.045, PII S0169433207012342
- Bonaccorso F, Bongiorno C, Fazio B, Gucciardi P G, Maragò O M, Morone A and Spinella C 2007 Appl. Surf. Sci. 254 1260 (Pubitemid 350138244)
- (2007) Applied Surface Science , vol.254 , Issue.4 , pp. 1260-1263
- Bonaccorso, F.¹ Bongiorno, C.² Fazio, B.³ Gucciardi, P.G.⁴ Marago, O.M.⁵ Morone, A.⁶ Spinella, C.⁷

12
- 54549114987
- 10.1007/s00339-008-4708-7 0947-8396 A
- Cappelli E, Scilletta C, Mattei G, Valentini V, Orlando S and Servidori M 2008 Appl. Phys. A 93 751
- (2008) Appl. Phys. , vol.93 , pp. 751
- Cappelli, E.¹ Scilletta, C.² Mattei, G.³ Valentini, V.⁴ Orlando, S.⁵ Servidori, M.⁶

13
- 0025519260
- 10.1557/JMR.1990.2398 0884-2914
- Davanloo F, Juengerman E, Jander D, Lee T and Collins C 1990 J. Mater. Res. 5 2398
- (1990) J. Mater. Res. , vol.5 , pp. 2398
- Davanloo, F.¹ Juengerman, E.² Jander, D.³ Lee, T.⁴ Collins, C.⁵

14
- 21544452592
- 10.1063/1.350501 0021-8979
- Pappas D L, Saenger K L, Bruley J, Krakow W, Cuomo J J, Gu T and Collins R W 1992 J. Appl. Phys. 71 5675
- (1992) J. Appl. Phys. , vol.71 , pp. 5675
- Pappas, D.L.¹ Saenger, K.L.² Bruley, J.³ Krakow, W.⁴ Cuomo, J.J.⁵ Gu, T.⁶ Collins, R.W.⁷

15
- 34748822416
- 10.1063/1.359871 0021-8979
- Voevodin A A, Laube S J P, Walck S D, Solomon J S, Donley M S and Zabinski J S 1995 J. Appl. Phys. 78 4123
- (1995) J. Appl. Phys. , vol.78 , pp. 4123
- Voevodin, A.A.¹ Laube, S.J.P.² Walck, S.D.³ Solomon, J.S.⁴ Donley, M.S.⁵ Zabinski, J.S.⁶

16
- 0030212370
- Preparation of amorphous diamond-like carbon by pulsed laser deposition: A critical review
- DOI 10.1016/0257-8972(95)02734-3
- Voevodin A A and Donley M S 1996 Surf. Coat. Technol. 82 199 (Pubitemid 126379841)
- (1996) Surface and Coatings Technology , vol.82 , Issue.3 , pp. 199-213
- Voevodin, A.A.¹ Donley, M.S.²

17
- 0037444845
- 10.1063/1.1555695 0021-8979
- Haverkamp J, Mayo R M, Bourham M A, Narayan J, Jin C and Duscher G 2003 J. Appl. Phys. 93 3627
- (2003) J. Appl. Phys. , vol.93 , pp. 3627
- Haverkamp, J.¹ Mayo, R.M.² Bourham, M.A.³ Narayan, J.⁴ Jin, C.⁵ Duscher, G.⁶

18
- 0036670813
- Preparation of carbon nanoparticles by plasma-assisted pulsed laser deposition method - Size and binding energy dependence on ambient gas pressure and plasma condition
- DOI 10.1016/S0040-6090(02)00532-1, PII S0040609002005321
- Suda Y, Ono T, Akazawa M, Sakai Y, Sujino J T and Homma N 2002 Thin Solid Films 415 15 (Pubitemid 34992109)
- (2002) Thin Solid Films , vol.415 , Issue.1-2 , pp. 15-20
- Suda, Y.¹ Ono, T.² Akazawa, M.³ Sakai, Y.⁴ Tsujino, J.⁵ Homma, N.⁶

19
- 34447295926
- Preparation of hydrogenated amorphous carbon films from polymers by nano- and femtosecond pulsed laser deposition
- DOI 10.1016/j.apsusc.2007.02.138, PII S0169433207004084, Photon-Assisted Synthesis and Processing of Functional Materials
- Budai J, Bereznai M, Szakács G, Szilágyi E and Tóth Z 2007 Appl. Surf. Sci. 253 8235 (Pubitemid 47058772)
- (2007) Applied Surface Science , vol.253 , Issue.19 , pp. 8235-8241
- Budai, J.¹ Bereznai, M.² Szakacs, G.³ Szilagyi, E.⁴ Toth, Z.⁵

20
- 84875225986
- 10.1016/j.carbon.2013.01.029 0008-6223
- Zani A, Dellasega D, Russo V and Pasonni M 2013 Carbon 56 358
- (2013) Carbon , vol.56 , pp. 358
- Zani, A.¹ Dellasega, D.² Russo, V.³ Pasonni, M.⁴

21
- 0037100989
- 10.1063/1.1481972 0021-8979
- Voevodin A A, Jones J G, Zabinski J S and Hultman L 2002 J. Appl. Phys. 92 724
- (2002) J. Appl. Phys. , vol.92 , pp. 724
- Voevodin, A.A.¹ Jones, J.G.² Zabinski, J.S.³ Hultman, L.⁴

22
- 0036470285
- Particle dynamics during nanoparticle synthesis by laser ablation in a background gas
- DOI 10.1063/1.1424048
- Nakata Y, Muramoto J, Okada T and Maeda M 2002 J. Appl. Phys. 91 1640 (Pubitemid 34148845)
- (2002) Journal of Applied Physics , vol.91 , Issue.3 , pp. 1640
- Nakata, Y.¹ Muramoto, J.² Okada, T.³ Maeda, M.⁴

23
- 30344439822
- Structure and properties of pulsed-laser deposited carbon nitride thin films
- DOI 10.1016/j.tsf.2005.09.172, PII S0040609005018286
- Riascos H, Neidhardt J, Radnóczi G Z, Emmerlich J, Zambrano G, Hultman L and Prieto P 2006 Thin Solid Films 497 1 (Pubitemid 43061056)
- (2006) Thin Solid Films , vol.497 , Issue.1-2 , pp. 1-6
- Riascos, H.¹ Neidhardt, J.² Radnoczi, G.Z.³ Emmerlich, J.⁴ Zambrano, G.⁵ Hultman, L.⁶ Prieto, P.⁷

24
- 84863727837
- 10.1109/TPS.2012.2197224 0093-3813
- Wang Z, Hiroaki Ito H and Masugata K 2012 IEEE Trans. Plasma Sci. 40 1815
- (2012) IEEE Trans. Plasma Sci. , vol.40 , pp. 1815
- Wang, Z.¹ Hiroaki Ito, H.² Masugata, K.³

25
- 0037443179
- 10.1016/S0169-4332(02)01384-3 0169-4332
- Geretovszky Z S, Haraszti T, Szörényi T, Antoni F and Fogarassy E 2003 Appl. Surf. Sci. 208-209 566
- (2003) Appl. Surf. Sci. , vol.208-209 , pp. 566
- Geretovszky, Z.S.¹ Haraszti, T.² Szörényi, T.³ Antoni, F.⁴ Fogarassy, E.⁵

26
- 0035109277
- Effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous carbon films prepared by pulsed laser deposition
- DOI 10.1116/1.1322641
- Wei Q, Sankar J, Sharma A K, Yamagata Y and Narayan J 2001 J. Vac. Sci. Technol. A 19 311 (Pubitemid 32168536)
- (2001) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.19 , Issue.1 , pp. 311-316
- Wei, Q.¹

27
- 17644372718
- Pulsed-laser deposition of carbon: From DLC to cluster-assembled films
- DOI 10.1016/j.tsf.2004.11.110, PII S0040609004016931, EMRS 2004, Symposium J
- Ossi P M, Bottani C E and Miotello A 2005 Thin Solid Films 482 2 (Pubitemid 40567764)
- (2005) Thin Solid Films , vol.482 , Issue.1-2 , pp. 2-8
- Ossi, P.M.¹ Bottani, C.E.² Miotello, A.³

28
- 29244479956
- Development of multi Faraday cup assembly for ion beam measurements from a low energy plasma focus device
- DOI 10.1143/JJAP.44.5199
- Mohanty S R, Bhuyan H, Neog N K, Rout R K and Hotta E 2005 Japan. J. Appl. Phys. 44 5199 (Pubitemid 43160864)
- (2005) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.44 , Issue.7 A , pp. 5199-5205
- Mohanty, S.R.¹ Bhuyan, H.² Neog, N.K.³ Rout, R.K.⁴ Hotta, E.⁵

29
- 0001510029
- 10.1016/0925-9635(95)00363-0 0925-9635
- Prawer S, Nugent K W, Lifshitz Y, Lempert G D, Grossman E, Kulik J, Avigal I and Kalish R 1996 Diamond Relat. Mater. 5 433
- (1996) Diamond Relat. Mater. , vol.5 , pp. 433
- Prawer, S.¹ Nugent, K.W.² Lifshitz, Y.³ Lempert, G.D.⁴ Grossman, E.⁵ Kulik, J.⁶ Avigal, I.⁷ Kalish, R.⁸

30
- 0035882062
- 10.1103/PhysRevB.64.075414 0163-1829 B
- Ferrari A C and Robertson J 2001 Phys. Rev. B 64 1
- (2001) Phys. Rev. , vol.64 , pp. 1
- Ferrari, A.C.¹ Robertson, J.²

31
- 0037165927
- 10.1016/S0927-796X(02)00005-0 0927-796X R
- Robertson J 2002 Mater. Sci. Eng. R 37 129
- (2002) Mater. Sci. Eng. , vol.37 , pp. 129
- Robertson, J.¹

32
- 0032181662
- 10.1016/S0169-4332(98)00319-5 0169-4332
- Mérel P, Tabbal M, Chaker M, Moisa S and Margot J 1998 Appl. Surf. Sci. 136 105
- (1998) Appl. Surf. Sci. , vol.136 , pp. 105
- Mérel, P.¹ Tabbal, M.² Chaker, M.³ Moisa, S.⁴ Margot, J.⁵

33
- 29244449327
- Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source
- DOI 10.1016/j.surfcoat.2004.08.073, PII S0257897204007212
- Paik N 2005 Surf. Coat. Technol. 200 2170 (Pubitemid 41819154)
- (2005) Surface and Coatings Technology , vol.200 , Issue.7 , pp. 2170-2174
- Paik, N.¹

34
- 33846305113
- Structural characterization of diamond-like carbon films for ultracold neutron applications
- DOI 10.1016/j.diamond.2006.06.008, PII S0925963506002160
- Atchinso F et al 2007 Diamond Relat. Mater. 16 334 (Pubitemid 46123935)
- (2007) Diamond and Related Materials , vol.16 , Issue.2 , pp. 334-341
- Atchison, F.¹ Brys, T.² Daum, M.³ Fierlinger, P.⁴ Foelske, A.⁵ Gupta, M.⁶ Henneck, R.⁷ Heule, S.⁸ Kasprzak, M.⁹ Kirch, K.¹⁰ Kotz, R.¹¹ Kuzniak, M.¹² Lippert, T.¹³ Meyer, C.-F.¹⁴ Nolting, F.¹⁵ Pichlmaier, A.¹⁶ Schneider, D.¹⁷ Schultrich, B.¹⁸ Siemroth, P.¹⁹ Straumann, U.²⁰ more..

35
- 60649109817
- 10.1364/AO.47.000G65 0003-6935
- Kushwaha A and Thareja R K 2008 Appl. Opt. 47 G65
- (2008) Appl. Opt. , vol.47 , pp. 65
- Kushwaha, A.¹ Thareja, R.K.²

36
- 0001094005
- 10.1063/1.1725592 0021-9606
- Berkowitz J and Chupka W A 1964 J. Chem. Phys. 40 2735
- (1964) J. Chem. Phys. , vol.40 , pp. 2735
- Berkowitz, J.¹ Chupka, W.A.²

37
- 34447524108
- 3 radical in carbon plasma
- DOI 10.1364/AO.46.004032
- Nemes L, Keszler A M, Parigger C G, Hornkohl J O, Michelsen H A and Stakhursky V 2007 Appl. Opt. 46 4032 (Pubitemid 47333755)
- (2007) Applied Optics , vol.46 , Issue.19 , pp. 4032-4040
- Nemes, L.¹ Keszler, A.M.² Parigger, C.G.³ Hornkohl, J.O.⁴ Michelsen, H.A.⁵ Stakhursky, V.⁶

38
- 0035247462
- 10.1063/1.1342031 0034-6748
- Wild J, Kudrna P, Gronych T, Brož J, Zelinger Z, Kubát P and Civis C 2001 Rev. Sci. Instrum. 72 1597
- (2001) Rev. Sci. Instrum. , vol.72 , pp. 1597
- Wild, J.¹ Kudrna, P.² Gronych, T.³ Brož, J.⁴ Zelinger, Z.⁵ Kubát, P.⁶ Civis, C.⁷

39
- 77956322460
- 10.1063/1.3475149 0021-8979 043309
- Donnelly T, Lunney J G, Amoruso S, Bruzzese R, Wang X and Ni X 2010 J. Appl. Phys. 108 043309
- (2010) J. Appl. Phys. , vol.108
- Donnelly, T.¹ Lunney, J.G.² Amoruso, S.³ Bruzzese, R.⁴ Wang, X.⁵ Ni, X.⁶

40
- 0242603790
- 10.1103/PhysRevB.61.14095 0163-1829
- Ferrari A and Robertson J 2000 Phys. Rev. B 61 14095
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.¹ Robertson, J.²

41
- 78649750368
- 10.1016/j.surfcoat.2010.08.093 0257-8972
- Cui W G, Lai Q B, Zhang L and Wang F M 2010 Surf. Coat. Technol. 205 1995
- (2010) Surf. Coat. Technol. , vol.205 , pp. 1995
- Cui, W.G.¹ Lai, Q.B.² Zhang, L.³ Wang, F.M.⁴

42
- 0000715415
- 10.1063/1.366193 0021-8979
- Sattel S, Robertson J and Ehrhardt H 1997 J. Appl. Phys. 82 4566
- (1997) J. Appl. Phys. , vol.82 , pp. 4566
- Sattel, S.¹ Robertson, J.² Ehrhardt, H.³

43
- 0034636234
- 10.1209/epl/i2000-00297-5 0295-5075 501
- Bonelli M, Fioravanti A P, Miotello A and Ossi P M 2000 Europhys. Lett. 50 501
- (2000) Europhys. Lett. , vol.50 , pp. 501
- Bonelli, M.¹ Fioravanti, A.P.² Miotello, A.³ Ossi, P.M.⁴

44
- 84862196994
- 0963-0252 034014
- Ruiz H M, F Guzmán F, Favre M, Bhuyan H, Chuaqui H and Wyndham E S 2012 Plasma Sources Sci. Technol. 21 034014
- (2012) Plasma Sources Sci. Technol. , vol.21
- Ruiz, H.M.¹ Guzmán F, F.² Favre, M.³ Bhuyan, H.⁴ Chuaqui, H.⁵ Wyndham, E.S.⁶

45
- 0032069730
- 10.1088/0022-3727/31/10/019 0022-3727
- Vivien C, Hermann J, Perrone A, Boulmer-Leborgne C and Luches A 1998 J. Phys. D: Appl. Phys. 31 1263
- (1998) J. Phys. D: Appl. Phys. , vol.31 , pp. 1263
- Vivien, C.¹ Hermann, J.² Perrone, A.³ Boulmer-Leborgne, C.⁴ Luches, A.⁵

46
- 0028515624
- 10.1007/BF02655355 0361-5235
- Murray P T and Peeler D T 1994 J. Electron Mater. 23 855
- (1994) J. Electron Mater. , vol.23 , pp. 855
- Murray, P.T.¹ Peeler, D.T.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.