Plasma plume characteristics and properties of pulsed laser deposited diamond-like carbon films

Journal of Applied Physics

Volumn 93, Issue 6, 2003, Pages 3627-3634

  Haverkamp, J ^a   Mayo, R M ^a,c   Bourham, M A ^a   Narayan, J ^a   Jin, C ^a   Duscher, G ^a,b  

^a North Carolina State University   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c BLP Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ELECTRON ENERGY LOSS SPECTROSCOPY; GRAPHITE; HIGH ENERGY LASERS; IONIZATION; PLASMAS; PULSED LASER DEPOSITION;

PLASMA PLUMES;

DIAMOND LIKE CARBON FILMS;

EID: 0037444845     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1555695     Document Type: Article

References (25)

1. Q. Wei and J. Narayan, Int. Mater. Rev. 45, 133 (2000).
2. J. Krishnaswamy, A. Rengan, J. Narayan, K. Vedan, and C. J. McHaurge, Appl. Phys. Lett. 54, 2455 (1989).
3. Q. Wei, R. J. Narayan, A. K. Sharma, J. Sankar, and J. Narayan, J. Vac. Sci. Technol. A 17, 3406 (1999).
4. R. J. Narayan, Q. Wei, A. K. Sharma, J. J. Cuomo, and J. Narayan, Mater. Res. Soc. Symp. Proc. 526, 355 (1998).
5. Q. Wei, A. K. Sharma, R. J. Narayan, N. M. Ravindra, S. Oktyabrsky, J. Sankar, and J. F. Muth, Mater. Res. Soc. Symp. Proc. 526, 331 (1998).
6. K. Lmimouni, C. Legrand, C. Dufour, A. Chapton, and C. Belouet, Appl. Phys. Lett. 78, 2437 (2001).
7. Q. Wei, J. Sankar, and J. Narayan, Surf. Coat. Technol. 146-147, 250 (2001).
8. D. H. Lowndes, V. I. Mekrulov, A. A. Puretzky, D. B. Geohegan, G. E. Jellison, Jr., C. M. Rouleau, and T. Thundat, Mater. Res. Soc. Symp. Proc. 526, 325 (1998).
9. R. M. Mayo, J. W. Newman, Y. Yamagata, A. Sharma, and J. Narayan, J. Appl. Phys. 86, 2865 (1999).
10. R. M. Mayo, J. W. Newman, Y. Yamagata, A. Sharma, and J. Narayan, J. Appl. Phys. 88, 4154 (2000).
11. J. Levoska and S. Leppavuori, Appl. Surf. Sci. 86, 180 (1995).
12. K. J. Koivusaari, J. Levoska, and S. Leppavuori, J. Appl. Phys. 85, 2915 (1999).
13. M. Chhowalla, A. C. Ferrari, J. Robertson, and G. A. J. Armaratunga, Appl. Phys. Lett. 76, 1419 (2000).
14. V. I. Merkulov, D. H. Lowndes, G. E. Jellison, Jr., A. A. Puretzky, and D. B. Geohegan, Appl. Phys. Lett. 73, 2591 (1998).
15. D. L. Pappas, K. L. Sanger, J. J. Cuomo, and R. W. Dreyfus, J. Appl. Phys. 72, 3966 (1992).
16. J. J. Cuomo, D. L. Pappas, J. Bruley, J. P. Doyle, and K. L. Sanger, J. Appl. Phys. 70, 1706 (1991).
17. D. H. Lowndes, in Pulsed Laser Ablation and Desorption, edited by J. C. Miller and R. F. Haglund (Academic, New York, 1998), Chap. 11.
18. S. B. Segall and D. W. Koopman, Phys. Fluids 16, 1149 (1973).
19. R. K. Singh and J. Narayan, Phys. Rev. B 41, 8843 (1990).
20. J. Narayan and J. Fletcher, in Defects in Semicondcutors, Mater. Res. Soc. Symp. Proc. 2, 191 (1981).
21. R. K. Singh, D. Bhattacharya, and J. Narayan, Appl. Phys. Lett. 57, 2022 (1990).
22. K. L. Sanger, J. Appl. Phys. 70, 5629 (1991).
23. J. W. Newman, Jr., Master's thesis, North Carolina State University (1999).
24. J. Kulik, Y. Lifshitz, G. D. Lempert, J. W. Rabalais, and D. Marton, J. Appl. Phys. 76, 5063 (1994).
25. S. D. Berger, D. R. McKenzie, and P. J. Martin, Philos. Mag. Lett. 57, 285 (1988).