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Volumn 208-209, Issue 1, 2003, Pages 566-574
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Morphological study of PLD grown carbon films
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Author keywords
Atomic force microscopy; DLC; Pulsed laser deposition; Surface structure; Thin film
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Indexed keywords
CARBON;
FILM GROWTH;
MICROSTRUCTURE;
MORPHOLOGY;
PRESSURE EFFECTS;
PULSED LASER DEPOSITION;
ATOMIC FORCE MICROSCOPY;
PRESSURE;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
CARBON FILMS;
FILM GROWTH RATE;
THIN FILMS;
DIAMOND LIKE CARBON FILMS;
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EID: 0037443179
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)01384-3 Document Type: Conference Paper |
Times cited : (14)
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References (18)
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