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Volumn 106, Issue , 2013, Pages 11-13
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Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition
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Author keywords
Al2O3; Laser CVD; Microstructure; Oriented growth
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Indexed keywords
COLUMNAR GROWTH;
DEPOSITION TEMPERATURES;
LASER CHEMICAL VAPOR DEPOSITION;
LASER CVD;
ORIENTATION DEGREE;
ORIENTED GROWTH;
POLYCRYSTALLINE;
VAPORIZATION TEMPERATURE;
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
FILM PREPARATION;
MICROSTRUCTURE;
VAPORS;
ALUMINUM;
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EID: 84878141304
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2013.04.113 Document Type: Article |
Times cited : (12)
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References (10)
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