Microstructure formation in a thick polymer by electrostatic-induced lithography

Journal of Micromechanics and Microengineering

Volumn 23, Issue 3, 2013, Pages

  Liu, G ^a,b   Yu, W ^a   Li, H ^a,b   Gao, J ^a   Flynn, D ^c   Kay, R W ^c   Cargill, S ^c   Tonry, C ^d   Patel, M K ^d   Bailey, C ^d   Desmulliez, M P Y ^c  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c HERIOT WATT UNIVERSITY   (United Kingdom)

^d UNIVERSITY OF GREENWICH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; FRESNEL ZONE PLATE; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICRO-LENS ARRAYS; MICROSTRUCTURE FORMATION; PHOTOSENSITIVE MATERIALS; SINUSOIDAL SURFACE PROFILES; WAVEGUIDE CORE;

ASPECT RATIO; ELECTROSTATICS; FABRICATION; MICROFLUIDICS; MICROSTRUCTURE;

LITHOGRAPHY;

EID: 84877999137     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/3/035018     Document Type: Article

References (30)

1. Kim H and Bankoff S G 1992 The effect of an electrostatic field on film flow down an inclined plane Phys. Fluids A 4 2117-30 (Pubitemid 23634783)
2. Schaffer E, Thurn-Albrecht T, Russell T P and Steiner U 2000 Electrically induced structure formation and pattern transfer Nature 403 874-7 (Pubitemid 30130984)
3. Lin Z, Kerle T, Baker S M and Hoagland D A 2001 Electric field induced instabilities at liquid/liquid interfaces J. Chem. Phys. 114 2377-81 (Pubitemid 32873139)
4. Schaffer E, Thurn-Albrecht T, Russell T P and Steiner U 2001 Electrohydrodynamic instability in polymer films Europhys. Lett. 53 518-24
5. Salac D, Lu W, Wang C-W and Sastry A M 2004 Pattern formation in a polymer thin film induced by an in-plane electric field Appl. Phy. Lett. 85 1161-3
6. Shankar V and Sharma A 2004 Instability of the interface between thin fluid films subjected to electric fields J. Colloid Interface Sci. 274 294-308 (Pubitemid 38534603)
7. Craster R V and Matar O K 2005 Electrically induced pattern formation in thin leaky dielectric films Phys. Fluids 17 032104 (Pubitemid 40426381)
8. Kim D and Lu W 2006 Interface instability and nanostructure patterning Comput. Mater. Sci. 38 418-25 (Pubitemid 44649222)
9. Uma B and Usha R 2008 A thin conducting viscous film on an inclined plane in the presence of a uniform normal electric field: bifurcation scenarios Phys. Fluids 20 032102 (Pubitemid 351493614)
10. Tseluiko D, Blyth M G, Papageorgiou D T and Vanden-Broeck J-M 2008 Electrified viscous thin film flow over topography Phys. Fluids 20 042103 (Pubitemid 351638965)
11. Tseluiko D, Blyth M G, Papageorgiou D T and Vanden-Broeck J-M 2008 Electrified viscous thin film flow over topography J. Fluid Mech. 597 449-75 (Pubitemid 351233843)
12. Wu N and Russel W B 2009 Micro- and nano-patterns created via electrohydrodynamic instabilities Nano Today 4 180-92
13. Srivastava S, Sankar R P D, Wang C, Bandyopadhyay D and Sharma A 2010 Electric field induced microstructures in thin films on physicochemically heterogeneous and patterned substrates J. Chem. Phys. 132 174703
14. Pattader P S G, Banerjee I, Sharma A and Bandyopadhyay D 2011 Multiscale Pattern Generation in Viscoelastic Polymer Films by Spatiotemporal Modulation of Electric Field and Control of Rheology Adv. Funct. Mater. 21 324-35
15. Tian E M, Svobodny T P and Philips J D 2011 Thin liquid film morphology driven by electro-static field Appl. Math. Mech. 32 1039-46
16. El-Sayed M F, Moussa M H M, Hassan A A A and Hafez N M 2011 Electrohydrodynamic instability of two thin viscous leaky dielectric fluid films in a porous medium Appl. Math. 2011 498718
17. Pease Leonard F III and Russel W B 2002 Linear stability analysis of thin leaky dielectric films subjected to electric fields J. Non-Newton. Fluid Mech. 102 233-50 (Pubitemid 34175954)
18. Lin Z, Kerle T and Russell T P 2002 Structure Formation at the interface of liquid/liquid bilayer in electric field Macromolecules 35 3971-76 (Pubitemid 34711557)
19. Russell T P, Lin Z, Schäffer E and Steiner U 2003 Aspects of electrohydrodynamic instabilities at polymer interfaces Fiber Polym. 4 1-7
20. Pease L F III and Russel W B 2003 Electrostatically induced submicron patterning of thin perfect and leaky dielectric films: a generalized linear stability analysis J. Chem. Phys. 118 3790-803
21. Pease L F III and Russel W B 2004 Limitations on length scales for electrostatically induced submicrometer pillars and holes Langmuir 20 795-804
22. Verma R, Sharma A, Kargupta K and Bhaumik J 2005 Electric field induced instability and pattern formation in thin liquid films Langmuir 21 3710-21 (Pubitemid 40538388)
23. Wu N, Peas L F III and Russel W B 2005 Electric-field-induced patterns in thin polymer films: weakly nonlinear and fully nonlinear evolution Langmuir 21 12290-302 (Pubitemid 43037195)
24. Wu N and Russel W B 2006 Electrohydrodynamic instability of dielectric bilayers: kinetics and thermodynamics Ind. Eng. Chem. 45 5455-65 (Pubitemid 44329219)
25. Tomar G, Shankar V, Sharma A and Biswas G 2007 Electrohydrodynamic instability of a confined viscoelastic liquid film J. Non-Newton. Fluid Mech. 143 120-30 (Pubitemid 46585848)
26. Sarkar J, Sharma A and Shenoy V B 2008 Electric-field induced instabilities and morphological phase transitions in soft elastic films Phys. Rev. E 77 031604 (Pubitemid 351415907)
27. Bandyopadhyay D, Sharma A, Thiele U and Sankar R P D 2009 Electric-field-induced interfacial instabilities and morphologies of thin viscous and elastic bilayers Langmuir 25 9108-18
28. Esmaeeli A and Reddy M N 2011 The electrohydrodynamics of superimposed fluids subjected to a nonuniform transverse electric field International J. Multiphase Flow 37 1331-47
29. Yu W et al 2010 High-aspect-ratio metal microchannel plates for microelectronic cooling applications J. Micromech. Microeng. 20 025004
30. Hin T Y, Liu C, Conway P P, Yu W, Cargill S and Desmulliez M P Y 2010 Fabrication of a polymeric optical waveguide-on-flex using electrostatic-induced lithography IEEE Photon. Technol. Lett. 22 957-9