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Applied Physics Letters

Volumn 102, Issue 14, 2013, Pages

Switchable static friction of piezoelectric composite-silicon wafer contacts

(4) Van Den Ende, D A a,b,c Fischer, H R b Groen, W A a,c Van Der Zwaag, S c

a HOLST CENTRE (Netherlands)

b TNO (Netherlands)

c DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; CAPILLARY ADHESION; CONTACT SURFACE AREA; CONTACTING ASPERITIES; ENGINEERING STATICS; NUMBER AND SIZE; PIEZOELECTRIC FIBER COMPOSITES; POLISHED SURFACES;

CERAMIC FIBERS; ELECTRIC FIELDS; PIEZOELECTRIC CERAMICS; REFRACTORY MATERIALS; SILICON; STICTION; SURFACE ROUGHNESS;

SILICON WAFERS;

EID: 84876367996 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4801459 Document Type: Article

Times cited : (2)

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