SCOPUS 정보 검색 플랫폼

Journal of Nanoscience and Nanotechnology

Volumn 13, Issue 3, 2013, Pages 2021-2024

Nanosize-controlled titanium nitride films in pulsed dc magnetron sputtering

(1) Chun, Sung Yong a

a Mokpo National University (South Korea)

Author keywords

Nano size control; Pulsed dc magnetron sputtering; Target frequency

Indexed keywords

CROSS-SECTIONAL MICROSTRUCTURE; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GRAZING-INCIDENCE X-RAY DIFFRACTION; HIGH-FREQUENCY PULSED PLASMA; PULSED DC MAGNETRON SPUTTERING; SIZE-CONTROL; TARGET FREQUENCIES; TITANIUM NITRIDE FILMS;

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; GRAIN SIZE AND SHAPE; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; METALLIC FILMS; SURFACE ROUGHNESS; TITANIUM NITRIDE; X RAY DIFFRACTION;

FILM PREPARATION;

EID: 84876260812 PISSN: 15334880 EISSN: 15334899 Source Type: Journal
DOI: 10.1166/jnn.2013.6970 Document Type: Article

Times cited : (4)

References (12)

1
- 33748419392
- A. Cavaleiro and J. Th. M. De Hosson, Nanostructured Coatings, Nanostructure Science and Technology (2006).
- (2006) Nanostructured Coatings, Nanostructure Science and Technology
- Cavaleiro, A.¹ De Hosson, J.Th.M.²

2
- 0036576044
- W. Bradley, H. Backer, Y. Aranda-Gonzalvo, P. K. Kelly, and R. D. Arnell, Plasma Sources Sci. Technol. 11, 165 (2002).
- (2002) Plasma Sources Sci. Technol. , vol.11 , pp. 165
- Bradley, W.¹ Backer, H.² Aranda-Gonzalvo, Y.³ Kelly, P.K.⁴ Arnell, R.D.⁵

3
- 0036147110
- W. Chou, G. Yu, and J. Huang, Surf. Coat. Technol. 149, 7 (2002).
- (2002) Surf. Coat. Technol. , vol.149 , pp. 7
- Chou, W.¹ Yu, G.² Huang, J.³

4
- 80955180555
- A. Hodroj and J. F. Pierson, Appl. Surf. Sci. 257, 8525 (2011).
- (2011) Appl. Surf. Sci. , vol.257 , pp. 8525
- Hodroj, A.¹ Pierson, J.F.²

5
- 18244393195
- S. Mukherjee, F. Maitz, M. Pham, E. Richter, F. Prokert, and W. Moeller, Surf. Coat. Technol. 196, 312 (2005).
- (2005) Surf. Coat. Technol. , vol.196 , pp. 312
- Mukherjee, S.¹ Maitz, F.² Pham, M.³ Richter, E.⁴ Prokert, F.⁵ Moeller, W.⁶

6
- 77953692023
- D. Bhaduri, A. Ghosh, S. Gangopadhyay, and S. Paul, Surf. Coat. Technol. 204, 3684 (2010).
- (2010) Surf. Coat. Technol. , vol.204 , pp. 3684
- Bhaduri, D.¹ Ghosh, A.² Gangopadhyay, S.³ Paul, S.⁴

7
- 0027908068
- S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
- (1993) Surf. Coat. Technol. , vol.61 , pp. 331
- Schiller, S.¹ Goedicke, K.² Reschke, J.³ Kirchhoff, V.⁴ Schneider, S.⁵ Milde, F.⁶

8
- 77957335781
- S. Khamseh, M. Nose, T. Kawabata, T. Nagae, K. Matsuda, and S. Ikeno, J. Alloys Compd. 508, 191 (2010).
- (2010) J. Alloys Compd. , vol.508 , pp. 191
- Khamseh, S.¹ Nose, M.² Kawabata, T.³ Nagae, T.⁴ Matsuda, K.⁵ Ikeno, S.⁶

9
- 0000301388
- J. Sellers, Surf. Coat. Technol. 98, 1245 (1998).
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1245
- Sellers, J.¹

10
- 0032316022
- W. D. Sproul, Vacuum 51, 641 (1998).
- (1998) Vacuum , vol.51 , pp. 641
- Sproul, W.D.¹

11
- 0027908068
- S. Schiller, K. Goedicke, J. Reschke, V. Kirchhoff, S. Schneider, and F. Milde, Surf. Coat. Technol. 61, 331 (1993).
- (1993) Surf. Coat. Technol. , vol.61 , pp. 331
- Schiller, S.¹ Goedicke, K.² Reschke, J.³ Kirchhoff, V.⁴ Schneider, S.⁵ Milde, F.⁶

12
- 65649109630
- P. H. Mayrhofer, G. Tischler, and C. Mitterer, Surf. Coat. Tech. 142, 144 (2001).
- (2001) Surf. Coat. Tech. , vol.142 , pp. 144
- Mayrhofer, P.H.¹ Tischler, G.² Mitterer, C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.