메뉴 건너뛰기




Volumn 21, Issue 7, 2013, Pages 8450-8459

A nanoscale conical polymethyl methacrylate (PMMA) sub-wavelength structure with a high aspect ratio realized by a stamping method

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; LIGHT POLARIZATION; NANOTECHNOLOGY; SILICON; SLOW WAVE STRUCTURES; STAMPING;

EID: 84876010157     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.008450     Document Type: Article
Times cited : (12)

References (22)
  • 2
    • 44149099068 scopus 로고    scopus 로고
    • Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
    • K. Nishioka, S. Horita, K. Ohdaira, and H. Matsumura, "Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle," Sol. Energy Mater. Sol. Cells 92, 919-922 (2008).
    • (2008) Sol. Energy Mater. Sol. Cells , vol.92 , pp. 919-922
    • Nishioka, K.1    Horita, S.2    Ohdaira, K.3    Matsumura, H.4
  • 3
    • 77957009361 scopus 로고    scopus 로고
    • Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures
    • M. Y. Chiu, C. H. Chang, M. A. Tsai, F. Y. Chang, and P. C. Yu, "Improved optical transmission and current matching of a triple-junction solar cell utilizing sub-wavelength structures," Opt. Express 18, A308-A313 (2010).
    • (2010) Opt. Express , vol.18
    • Chiu, M.Y.1    Chang, C.H.2    Tsai, M.A.3    Chang, F.Y.4    Yu, P.C.5
  • 4
    • 77957015789 scopus 로고    scopus 로고
    • Shape effect of silicon nitride subwavelength structure on reflectance for silicon solar cells
    • K. C. Sahoo, Y. Li, and E. Y. Chang, "Shape effect of silicon nitride subwavelength structure on reflectance for silicon solar cells," IEEE Trans. Electron Dev. 57, 2427-2433 (2010).
    • (2010) IEEE Trans. Electron Dev. , vol.57 , pp. 2427-2433
    • Sahoo, K.C.1    Li, Y.2    Chang, E.Y.3
  • 5
    • 0343341876 scopus 로고    scopus 로고
    • Fabrication of high-density nanostructures by electron beam lithography
    • O. Dial, C. C. Cheng, and A. Scherer, "Fabrication of high-density nanostructures by electron beam lithography," J. Vac. Sci. Technol. B 16, 3887-3890 (1998).
    • (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3887-3890
    • Dial, O.1    Cheng, C.C.2    Scherer, A.3
  • 6
    • 67649379403 scopus 로고    scopus 로고
    • Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer
    • Y. M. Song, S. Y. Bae, J. S. Yu, and Y. T. Lee, "Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer," Opt. Lett. 34, 1702-1704 (2009).
    • (2009) Opt. Lett. , vol.34 , pp. 1702-1704
    • Song, Y.M.1    Bae, S.Y.2    Yu, J.S.3    Lee, Y.T.4
  • 8
    • 0942300038 scopus 로고    scopus 로고
    • Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff
    • Z. Yu, H. Gao, W. Wu, H. Ge, and S. Y. Chou, "Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff," J. Vac. Sci. Technol. B 21, 2874-2877 (2003).
    • (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2874-2877
    • Yu, Z.1    Gao, H.2    Wu, W.3    Ge, H.4    Chou, S.Y.5
  • 9
    • 43249092818 scopus 로고    scopus 로고
    • The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography
    • N. Koo, U. Plachetka, M. Otto, J. Bolten, J. Jeong, E. Lee, and H. Kurz, "The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography," Nanotechnology 19, 225304-225307 (2008).
    • (2008) Nanotechnology , vol.19 , pp. 225304-225307
    • Koo, N.1    Plachetka, U.2    Otto, M.3    Bolten, J.4    Jeong, J.5    Lee, E.6    Kurz, H.7
  • 10
    • 79953801630 scopus 로고    scopus 로고
    • Fabrication of a cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively-coupled-plasma reactive ion etching
    • D. S. Kim, M. S. Park, and J. H. Jang, "Fabrication of a cone-shaped subwavelength structures by utilizing a confined convective self-assembly technique and inductively-coupled-plasma reactive ion etching," J. Vac. Sci. Technol. B 29, 020602 (2011).
    • (2011) J. Vac. Sci. Technol. B , vol.29 , pp. 020602
    • Kim, D.S.1    Park, M.S.2    Jang, J.H.3
  • 11
    • 0036765160 scopus 로고    scopus 로고
    • Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique
    • Y. Kanamori and K. Hane, "Broadband antireflection subwavelength gratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev. 9, 183-185 (2002).
    • (2002) Opt. Rev. , vol.9 , pp. 183-185
    • Kanamori, Y.1    Hane, K.2
  • 12
    • 43049154837 scopus 로고    scopus 로고
    • Two-dimensional nanopatterning by PDMS relief structures of polymeric colloidal crystals
    • H. J. Nam, J. H. Kim, D. Y. Jung, J. B. Park, and H. S. Lee, "Two-dimensional nanopatterning by PDMS relief structures of polymeric colloidal crystals," Appl. Surf. Sci. 254, 5134-5140 (2008).
    • (2008) Appl. Surf. Sci. , vol.254 , pp. 5134-5140
    • Nam, H.J.1    Kim, J.H.2    Jung, D.Y.3    Park, J.B.4    Lee, H.S.5
  • 13
    • 75149197680 scopus 로고    scopus 로고
    • Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer
    • J. Y. Chen and K. W. Sun, "Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer," Sol. Energy Mater. Sol. Cells 94, 629-633 (2010).
    • (2010) Sol. Energy Mater. Sol. Cells , vol.94 , pp. 629-633
    • Chen, J.Y.1    Sun, K.W.2
  • 14
    • 67349105702 scopus 로고    scopus 로고
    • Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method
    • K. S. Han, H. Lee, D. Kim, and H. Lee, "Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method," Sol. Energy Mater. Sol. Cells 93, 1214-1217 (2009).
    • (2009) Sol. Energy Mater. Sol. Cells , vol.93 , pp. 1214-1217
    • Han, K.S.1    Lee, H.2    Kim, D.3    Lee, H.4
  • 15
    • 42449107411 scopus 로고    scopus 로고
    • Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology
    • C. J. Ting, M. C. Huang, H. Y. Tsai, C. P.Chou, and C. C. Fu, "Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology," Nanotechnology 19, 205301 (2008).
    • (2008) Nanotechnology , vol.19 , pp. 205301
    • Ting, C.J.1    Huang, M.C.2    Tsai, H.Y.3    Chou, C.P.4    Fu, C.C.5
  • 16
    • 70249105043 scopus 로고    scopus 로고
    • Optical characteristics of moth-eye structures on poly(methyl methacrylate) and polycarbonate sheets fabricated by thermal nanoimprinting processes
    • H. Y. Tsai and C. J. Ting, "Optical characteristics of moth-eye structures on poly(methyl methacrylate) and polycarbonate sheets fabricated by thermal nanoimprinting processes," Jpn. J. Appl. Phys. 48, 06FH19 (2009).
    • (2009) Jpn. J. Appl. Phys. , vol.48
    • Tsai, H.Y.1    Ting, C.J.2
  • 17
    • 0344035406 scopus 로고    scopus 로고
    • Micro-optical components based on silicon mold technology
    • Y. Li, S. Minoru, and H. Kazuhiro, "Micro-optical components based on silicon mold technology," Opt. Laser Eng. 41, 545-552 (2004).
    • (2004) Opt. Laser Eng. , vol.41 , pp. 545-552
    • Li, Y.1    Minoru, S.2    Kazuhiro, H.3
  • 18
    • 79953655402 scopus 로고    scopus 로고
    • Anti-reflection and hydrophobic characteristics of M-PDMS based moth-eye nano-patterns on protection glass of photovoltaic systems
    • J. H. Shin, K. S. Han, and H. Lee, "Anti-reflection and hydrophobic characteristics of M-PDMS based moth-eye nano-patterns on protection glass of photovoltaic systems," Prog. Photovolt. Res. Appl. 19, 339-344 (2011).
    • (2011) Prog. Photovolt. Res. Appl. , vol.19 , pp. 339-344
    • Shin, J.H.1    Han, K.S.2    Lee, H.3
  • 19
    • 0028531768 scopus 로고
    • Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings
    • E. B. Grann, M. G. Moharam, and D. A. Pommet, "Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings," J. Opt. Soc. Am. A 11, 2695-2703 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 2695-2703
    • Grann, E.B.1    Moharam, M.G.2    Pommet, D.A.3
  • 20
    • 69949135990 scopus 로고
    • Antireflection structured surfaces for the infrared spectral region
    • D. H. Raguin and G. M. Morris, "Antireflection structured surfaces for the infrared spectral region," Appl. Opt. 32, 1154-1167 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 1154-1167
    • Raguin, D.H.1    Morris, G.M.2
  • 21
  • 22
    • 77953548917 scopus 로고    scopus 로고
    • Design of highly transparent glasses with broadband antireflective subwavelength structures
    • Y. M .Song, H. J. Choi, J. S. Yu, and Y. T. Lee, "Design of highly transparent glasses with broadband antireflective subwavelength structures," Opt. Express 18, 13063-13071 (2010).
    • (2010) Opt. Express , vol.18 , pp. 13063-13071
    • Song, Y.M.1    Choi, H.J.2    Yu, J.S.3    Lee, Y.T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.