Interdigitated 3-D silicon ring microelectrodes for DEP-based particle manipulation

Journal of Microelectromechanical Systems

Volumn 22, Issue 2, 2013, Pages 363-371

  Xing, Xiaoxing ^a   Zhang, Mengying ^a   Yobas, Levent ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

3 D; Cell; constriction; dielectrophoresis (DEP); electrode; etch; focusing; interdigitated; lateral; manipulation; microelectrode; particle; release; silicon (Si)

Indexed keywords

3-D; CONSTRICTION; ETCH; INTERDIGITATED; LATERAL; MANIPULATION; RELEASE;

ASPECT RATIO; CELLS; ELECTRODES; ELECTROMECHANICAL DEVICES; ELECTROPHORESIS; FOCUSING; MEMS; MICROELECTRODES; MOLECULAR BIOLOGY; PARTICLES (PARTICULATE MATTER); POLYSTYRENES; SILICON;

SILICON WAFERS;

EID: 84875813071     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2224641     Document Type: Article

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