NiCr MEMS tactile sensors embedded in polyimide toward smart skin

Journal of Microelectromechanical Systems

Volumn 22, Issue 2, 2013, Pages 349-355

  Kilaru, Rohit ^a   Celik Butler, Zeynep ^a   Butler, Donald P ^a   Gonenli, Ismail Erkin ^b  

^a The University of Texas at Arlington   (United States)

^b IBM RESEARCH   (United States)

Author keywords

Aluminum oxide; nichrome (NiCr); superstrate bonding; tactile sensors

Indexed keywords

ALUMINUM OXIDES; BRIDGE CONFIGURATION; MEMBRANE DEFLECTIONS; NICHROME; POLYIMIDE LAYERS; SUPERSTRATES; TACTILE SENSOR ARRAY; TACTILE SENSORS;

BRIDGE CIRCUITS; ELECTROMECHANICAL DEVICES; GAGES; MEMS; OXIDES; POLYIMIDES;

SENSORS;

EID: 84875810297     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2222867     Document Type: Article

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