Cluster ion beam processing: Review of current and prospective applications

Materials Research Society Symposium Proceedings

Volumn 1354, Issue , 2012, Pages 21-32

  Yamada, Isao ^a   Khoury, Joseph ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b Exogenesis Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER ION BEAMS; CURRENT STATUS; ION BEAM TECHNOLOGIES; LATERAL SPUTTERING; LOW ENERGY SURFACES; MODIFY SURFACE; NANOSCALE PROCESSING; PROSPECTIVE APPLICATIONS;

INDUSTRIAL APPLICATIONS; ION BEAMS; NANOTECHNOLOGY; SURFACE ANALYSIS;

FIBER OPTIC SENSORS;

EID: 84875479106     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2011.1081     Document Type: Conference Paper

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