Secondary ion mass spectrometry with gas cluster ion beams

Materials Research Society Symposium - Proceedings

Volumn 647, Issue , 2001, Pages

  Toyoda, N ^a   Matsuo, J ^a   Aoki, T ^a   Chiba, S ^a   Yamada, I ^a   Fenner, D B ^a   Torti, R ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; COMPUTER SIMULATION; DEPOSITION; ION BEAMS; MIXING; MOLECULAR DYNAMICS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS;

ENERGETIC IONS; GAS CLUSTER; HIGH RESOLUTION DEPTH PROFILING; ION IMPACT; ION MIXING; SMOOTHING EFFECTS;

ARGON;

EID: 0035172048     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)