Template-based synthesis of aluminum nitride hollow nanofibers via plasma-enhanced atomic layer deposition

Journal of the American Ceramic Society

Volumn 96, Issue 3, 2013, Pages 916-922

  Ozgit Akgun, Cagla ^a   Kayaci, Fatma ^a   Donmez, Inci ^a   Uyar, Tamer ^a   Biyikli, Necmi ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); AVERAGE FIBER DIAMETERS; CHEMICAL COMPOSITIONS; HEXAGONAL CRYSTAL STRUCTURE; PLASMA-ENHANCED ATOMIC LAYER DEPOSITION; POLYMERIC NANOFIBERS; SELECTED AREA ELECTRON DIFFRACTION; TEMPLATE-BASED SYNTHESIS;

ALUMINUM NITRIDE; CALCINATION; DEPOSITION; ELECTRON DIFFRACTION; FIBERS; PHOTOELECTRONS; POLYMERS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOFIBERS;

EID: 84875255453     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/jace.12030     Document Type: Article

References (30)

1. V. N. Tondare, C. Balasubramanian, S. V. Shende, D. S. Joag, V. P. Godbole, and, S. V. Bhoraskar, " Field Emission from Open Ended Aluminum Nitride Nanotubes," Appl. Phys. Lett., 80 [ 25 ] 4813-5 (2002).
2. Q. Wu, Z. Hu, X. Wang, Y. Lu, X. Chen, H. Xu, and, Y. Chen, " Synthesis and Characterization of Faceted Hexagonal Aluminum Nitride Nanotubes," J. Am. Chem. Soc., 125 [ 34 ] 10176-7 (2003).
3. L.-W. Yin, Y. Bando, Y.-C. Zhu, D. Golberg, and, M. S. Li, " A Two-Stage Route to Coaxial Cubic-Aluminum-Nitride-Boron- Nitride Composite Nanotubes," Adv. Mater., 16 [ 11 ] 929-33 (2004).
4. 3 and Bi," J. Am. Ceram. Soc., 92 [ 11 ] 2578-82 (2009).
5. R. Thapa, B. Saha, N. S. Das, U. N. Maiti, and, K. K. Chattopadhyay, " Self Filling of Ni Nanoparticles in Amorphous AlN Nanotubes and its Field Emission Property," Appl. Surf. Sci., 256 [ 12 ] 3988-92 (2010).
6. Y. Fan, " Formation of Crystalline AlN Nanotubes by a Roll-Up Approach," Mat. Lett., 65 [ 12 ] 1900-2 (2011).
7. Y. Sun, J. Y. Li, Y. Tan, and, L. Zhang, " Fabrication of Aluminum Nitride (AlN) Hollow Fibers by Carbothermal Reduction and Nitridation of Electrospun Precursor Fibers," J. Alloy. Compd., 471 [ 1-2 ] 400-3 (2009).
8. Z. Zhou, J. Zhao, Y. Chen, P. von Ragué Schleyer, and, Z. Chen, " Energetics and Electronic Structures of AlN Nanotubes/Wires and Their Potential Application as Ammonia Sensors," Nanotechnology 18 [ 42 ] 424023 7pp (2007).
9. A. Ahmadi, N. L. Hadipour, M. Kamfiroozi, and, Z. Bagheri, " Theoretical Study of Aluminum Nitride Nanotubes for Chemical Sensing of Formaldehyde," Sensor. Actuat. B, 161 [ 1 ] 1025-9 (2012).
10. L.-W. Yin, Y. Bando, Y. C. Zhu, M.-S. Li, C.-C. Tang, and, D. Goldberg, " Single-Crystalline AlN Nanotubes with Carbon-Layer Coatings on the Outer and Inner Surfaces via a Multiwalled-Carbon-Nanotube-Template-Induced Route," Adv. Mater., 17 [ 2 ] 213-7 (2005).
11. G. Stan, C. V. Ciobanu, T. P. Thayer, G. T. Wang, J. R. Creighton, K. P. Purushotham, L. A. Bendersky, and, R. F. Cook, " Elastic Moduli of Faceted Aluminum Nitride Nanotubes Measured by Contact Resonance Atomic Force Microscopy," Nanotechnology 20 [ 3 ] 035706 6pp (2009).
12. R. L. Puurunen, " Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/Water Process," J. Appl. Phys. 97 [ 12 ] 121301 52pp (2005).
13. A. Greiner, and, J. H. Wendorff, " Electrospinning: A Fascinating Method for the Preparation of Ultrathin Fibers," Angew. Chem. Int. Ed., 46 [ 30 ] 5670-703 (2007).
14. 3 Microtubes with Precise Wall Thickness Control," Nano Lett., 7 [ 3 ] 719-22 (2007).
15. 2 Nanotube Microyarn and Its Gas Sensing Behavior," Smart Mater. Struct. 20 [ 10 ] 105019 7pp (2011).
16. 2 Nanotubes Fabricated Using Electrospinning and Atomic Layer Deposition and Their Gas Sensing Performance," Nanotechnology, 21 [ 24 ] 245605 7pp (2010).
17. G.-M. Kim, S.-M. Lee, G. H. Michler, H. Roggendorf, U. Gösele, and, M. Knez, " Nanostructured Pure Anatase Titania Tubes Replicated from Electrospun Polymer Fiber Templates by Atomic Layer Deposition," Chem. Mater., 20 [ 9 ] 3085-91 (2008).
18. 2 Fibers Using Atomic Layer Deposition on Polymer Templates," J. Am. Ceram. Soc., 94 [ 7 ] 1974-7 (2011).
19. J. Y. Park, S.-W. Choi, and, S. S. Kim, " A Synthesis and Sensing Application of Hollow ZnO Nanofibers with Uniform Wall Thicknesses Grown Using Polymer Templates," Nanotechnology, 21 [ 47 ] 475601 9pp (2010).
20. 2 Plasma Process and an Annealing Process," Sensor. Actuat. B, 162 [ 1 ] 300-6 (2012).
21. E. Santala, M. Kemell, M. Leskelä, and, M. Ritala, " The Preparation of Reusable Magnetic and Photocatalytic Composite Nanofibers by Electrospinning and Atomic Layer Deposition," Nanotechnology, 20 [ 3 ] 035602 5pp (2009).
22. 2-ZnO Core-Shell Nanofibers," J. Am. Ceram. Soc., 92 [ 11 ] 2551-4 (2009).
23. 2-ZnO Core-Shell Nanofibers via a Novel Two-Step Process and Their Gas Sensing Properties," Nanotechnology, 20 [ 46 ] 465603 6pp (2009).
24. Q. Peng, X.-Y. Sun, J. C. Spagnola, C. Saquing, S. A. Khan, R. J. Spontak, and, G. N. Parsons, " Bi-directional Kirkendall Effect in Coaxial Microtube Nanolaminate Assemblies Fabricated by Atomic Layer Deposition," ACS Nano, 3 [ 3 ] 546-54 (2009).
25. C. Ozgit, I. Donmez, M. Alevli, and, N. Biyikli, " Self-Limiting Low-Temperature Growth of Crystalline AlN Thin Films by Plasma-Enhanced Atomic Layer Deposition," Thin Solid Films, 520 [ 7 ] 2750-5 (2012).
26. Z. M. Huang, Y. Z. Zhang, M. Kotaki, and, S. Ramakrishna, " A Review on Polymer Nanofibers by Electrospinning and Their Applications in Nanocomposites," Compos. Sci. Technol., 63 [ 15 ] 2223-53 (2003).
27. T. Uyar, and, F. Besenbacher, " Electrospinning of Uniform Polystyrene Fibers: The Effect of Solvent Conductivity," Polymer, 49 [ 24 ] 5336-43 (2008).
28. L. Rosenberger, R. Baird, E. McCullen, G. Auner, and, G. Shreve, " XPS Analysis of Aluminum Nitride Films Deposited by Plasma Source Molecular Beam Epitaxy," Surf. Interface Anal., 40 [ 9 ] 1254-61 (2008).
29. D. Manova, V. Dimitrova, W. Fukarek, and, D. Karpuzov, " Investigation of D.C.-Reactive Magnetron-Sputtered AlN Thin Films by Electron Microprobe Analysis, X-Ray Photoelectron Spectroscopy and Polarised Infra-Red Reflection," Surf. Coat. Technol., 106 [ 2-3 ] 205-8 (1998).
30. H. M. Liao, R. N. S. Sodhi, and, T. W. Coyle, " Surface Composition of AIN Powders Studied by X-Ray Photoelectron Spectroscopy and Bremsstrahlung-Excited Auger Electron Spectroscopy," J. Vac. Sci. Technol., A, 11 [ 5 ] 2681-6 (1993).