Fabrication of high-aspect-ratio resonance domain diffraction gratings in fused silica

Optical Engineering

Volumn 51, Issue 11, 2012, Pages

  Barlev, Omri ^a   Golub, Michael A ^a   Friesem, Asher A ^b   Mahalu, Diana ^b   Nathan, Menachem ^a  

^a TEL AVIV UNIVERSITY   (Israel)

^b WEIZMANN INSTITUTE OF SCIENCE   (Israel)

Author keywords

Diffraction and gratings; Diffractive optics; Holography; Micro optics; Resonance domain

Indexed keywords

DIFFRACTION AND GRATINGS; E-BEAM LITHOGRAPHY; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPIES (ESEM); FABRICATION PARAMETERS; OPTICAL MEASUREMENT; RESONANCE DOMAINS; TRANSMISSION RESONANCE; VISIBLE SPECTRAL REGIONS;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; DIFFRACTION EFFICIENCY; DIFFRACTIVE OPTICS; FABRICATION; HOLOGRAPHY; MICROOPTICS; OPTICAL DATA PROCESSING; RESONANCE; SCANNING ELECTRON MICROSCOPY;

DIFFRACTION GRATINGS;

EID: 84875041108     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.OE.51.11.118002     Document Type: Article

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