Modelling adapted to manufacturing aspects of holographic grating structures

Journal of the European Optical Society

Volumn 6, Issue , 2011, Pages

  Sandfuchs, O ^a   Schwanke, C ^b,c   Burkhardt, M ^a   Wyrowski, F ^b   Gatto, A ^a   Brunner, R ^a,d  

^a CARL ZEISS SMT AG   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^c FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^d UNIVERSITY OF APPLIED SCIENCES JENA   (Germany)

Author keywords

Diffraction gratings; Efficiency performance optimization; Holographic manufacturing; Resist simulation; Structural and optical characterization

Indexed keywords

DIFFRACTION EFFICIENCY; EFFICIENCY; HOLOGRAPHY; MANUFACTURE; NUMERICAL METHODS;

DIELECTRIC STRUCTURE; EFFICIENCY-PERFORMANCE OPTIMIZATIONS; HIGH SPATIAL FREQUENCY; HOLOGRAPHIC MANUFACTURING; RESIST SIMULATION; SAW-TOOTH STRUCTURE; STRUCTURAL AND OPTICAL CHARACTERIZATIONS; SUPER-GAUSSIAN SHAPES; DIFFRACTIVE IMAGING;

DIFFRACTION GRATINGS;

EID: 79953203605     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2011.11006     Document Type: Article

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