Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

Applied Optics

Volumn 36, Issue 23, 1997, Pages 5717-5727

  Miller, J Michael ^a   Beaucoudrey, Nicole de ^a   Chavel, Pierre ^a   Turunen, Jari ^b   Cambril, Edmond ^a  

^a CNRS   (France)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Grating couplers; Planar optics; Slanted surface relief profiles; Subwavelength gratings

Indexed keywords

EID: 5844321497     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005717     Document Type: Article

References (29)

1. J. Jahns and A. Huang, “Planar integration of free-space optical components, ” Appl. Opt. 28, 1602-1605 (1989).
2. S. J. Walker and J. Jahns, “Optical clock distribution using integrated free-space optics, ” Opt. Commun. 90, 359-371 (1992).
3. R. Petit, ed., Electromagnetic Theory of Gratings, Vol. 22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980).
4. E. Noponen, A. Vasara, J. Turunen, J. M. Miller, and M. R. Taghizadeh, “Synthetic diffractive optics in the resonance domain, ” J. Opt. Soc. Am. A 9, 1206-1213 (1992).
5. A. A. Friesem and Y. Amitai, “Planar diffractive elements for compact optics, ” in Trends in Optics: Research, Developments and Applications, A. Consortini, ed. (Academic, San Diego, Calif., 1996), pp. 125-144.
6. J. Turunen and F. Wyrowski, “Diffractive optics: from promise to fruition, ” in Trends in Optics: Research, Developments and Applications, A. Consortini, ed. (Academic, San Diego, Calif., 1996), pp. 111-123.
7. J. M. Miller, J. Turunen, E. Noponen, A. Vasara, and M. R. Taghizadeh, “Rigorous modal theory for multiply grooved lamellar gratings, ” Opt. Commun. 111, 526-535 (1994).
8. J. Saarinen, E. Noponen, J. Turunen, T. Suhara, and H. Nishi-hara, “Asymmetric beam deflection by doubly grooved binary gratings, ” Appl. Opt. 33, 2401-2405 (1995).
9. E. Noponen, J. Turunen, and A. Vasara, “Parametric optimization of multilevel diffractive optical elements by electromagnetic theory, ” Appl. Opt. 31, 5910-5912 (1992).
10. R. K. Kostuk, Y.-T. Huang, D. Hetherington, and M. Kato, “Reducing alignment and chromatic sensitivity of holographic interconnects with substrate-mode holograms, ” Appl. Opt. 28, 4939-4944 (1989).
11. J. H. Yeh and R. K. Kostuk, “Free-space holographic optical interconnects for board-to-board and chip-to-chip interconnections, ” Opt. Lett. 21, 1274-1276 (1996).
12. S. Natarajan, C. Zhao, and R. T. Chen, “Bi-directional optical backplane bus for general purpose multi-processor board-to-board optoelectronic interconnects, ” J. Lightwave Technol. 13, 1031-1040 (1995).
13. T. Nakaya, Y. Katoh, T. Kubota, and M. Takeda, “Diffraction5726 APPLIED OPTICS/Vol. 36, No. 23/10 August 1997 efficiency of a grating coupler for an array illuminator, ” Appl. Opt. 35, 3891-3898 (1996).
14. J. W. Parker, “Optical interconnection for advanced processor systems: a review of the esprit ii olives program, ” J. Lightwave Technol. 9, 1764-1773 (1991).
15. S. Paineau, J.-P. Ghesquiers, M. Charrier, and T. Lemoine, “Clock distribution by holographic optical backplane in massively parallel processor architecture, ” in Free Space Micro-Optical Systems (European Optical Society, Engelberg, Switzerland, 1996), pp. 52-53.
16. J. M. Miller, N. de Beaucoudrey, P. Chavel, M. Francois, and J. Turunen, “inclined binary high-frequency gratings for an optical backplane interconnect, ” in Proceedings of a Workshop on Diffractive Optics, Prague, Czech Republic, August 1995, pp. 33-34.
17. N. de Beaucoudrey, J. M. Miller, P. Chavel, and J. Turunen, “On the design and fabrication of high efficiency inclined binary high frequency gratings, ” in Specification, Production, and Testing ofOptical Components and Systems, A. E. Gee and J. Houee, eds., Proc. SPIE 2775, 533-536 (1996).
18. M. Takeda and T. Kubota, “Integrated optic array illuminator: a design for efficient and uniform power distribution, ” Appl. Opt. 30, 1090-1095 (1991).
19. D. Maystre, ed., Selected Papers on Diffraction Gratings, Vol. M583 of SPIE Milestone Series (SPIE Press, Bellingham, Wash., 1993), pp. xvii-xxx.
20. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, London, 1989), pp. 705-708.
21. N. Chateau and J.-P. Hugonin, “Algorithm for the rigorous coupled-wave analysis of grating diffraction, ” J. Opt. Soc. Am. A 11, 1321-1331 (1994).
22. A. Vasara, M. R. Taghizadeh, J. Turunen, J. Westerholm, E. Noponen, H. Ichikawa, J. M. Miller, T. Jaakkola, and S. Kuisma, “Binary surface-relief gratings for array illumination in digital optics, ” Appl. Opt. 31, 3320-3336 (1992).
23. 2 containing gases, ” J. Vac. Sci. Technol. 19, 225-230 (1981).
24. 2 reactive ion etching, ” Appl. Phys. Lett. 53, 2549-2551 (1988).
25. B. Jacobs and R. Zengerle, “Reactive ion etching of sloped sidewalls for surface emitting structures using a shadow mask technique, ” J. Vac. Sci. Technol. B 14, 2537-2542 (1996).
26. J. M. Miller, N. de Beaucoudrey, P. Chavel, E. Cambril, and H. Launois, “Synthesis of a subwavelength-pulse-width spatially modulated array illuminator for 0.633 p.m, ” Opt. Lett. 21, 1399-1401 (1996).
27. J. Bell, “Market misses message about diffractive optics, ” Opto Laser Europe 21-28 (March 1997).
28. E. Tervonen, J. Turunen, and J. Pekola, “Pulse-frequency-modulated high-frequency-carrier diffractive elements for pattern projection, ” Opt. Eng. 33, 2579-2587 (1994).
29. M. Li, A. Larsson, N. Eriksson, and M. Hagberg, “Continuous-level phase-only computer-generated hologram realized by dislocated binary gratings, ” Opt. Lett. 21, 1516-1518 (1996).