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Volumn 138, Issue 2-3, 2013, Pages 514-518

Catalyst free carbon nitride nanostructures prepared by rf-PECVD technique on hydrogenated amorphous carbon template

Author keywords

Chemical vapor deposition (CVD); Electron microscopy (SEM); Fourier transform infrared spectroscopy (FTIR); Nanostructures

Indexed keywords

CATALYST-FREE; CHEMICAL VAPOR DEPOSITIONS (CVD); ELECTRON MICROSCOPY (SEM); FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FTIR SPECTROSCOPY; HYDROGENATED AMORPHOUS CARBON; METHANE PLASMA; NANOSTRUCTURED CARBONS; NITRIDE NANOSTRUCTURES; RADIO FREQUENCY PLASMA; RF POWER; RF-PECVD; STRUCTURAL CHARACTERISTICS; UNDERLAYERS;

EID: 84874527513     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.12.012     Document Type: Article
Times cited : (11)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.