Analysis of Fabry-Perot optical micro-cavities based on coating-free all-Silicon cylindrical Bragg reflectors

Optics Express

Volumn 21, Issue 2, 2013, Pages 2378-2392

  Malak, Maurine ^a   Gaber, Noha ^a   Marty, Frédéric ^a   Pavy, Nicolas ^a   Richalot, Elodie ^b   Bourouina, Tarik ^a  

^a UNIVERSITÉ PARIS EST   (France)

^b UNIVERSITÉ GUSTAVE EIFFEL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG REFLECTORS; COATINGS; COMPUTER SIMULATION; ENERGY DISSIPATION; FABRY-PEROT INTERFEROMETERS; OPTICAL FIBERS; REFLECTION; SILICON;

ANALYTES; BEHAVIORAL ANALYSIS; COMBINED EFFECT; COUPLING LIGHT; CYLINDRICAL BRAGG REFLECTORS; CYLINDRICAL LENS; CYLINDRICAL REFLECTORS; CYLINDRICAL SHAPES; FABRY-PEROT; FABRY-PEROT CAVITY; LARGE CAVITIES; LIGHT CONFINEMENTS; LONGITUDINAL MODES; MODE MATCHING; OPTICAL MICROCAVITIES; QUALITY FACTOR Q; SELECTIVE EXCITATIONS; SUBSTANTIAL REDUCTION;

RESONATORS;

SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; INTERFEROMETRY; OPTICAL INSTRUMENTATION; REFRACTOMETRY; THEORETICAL MODEL;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INTERFEROMETRY; LENSES; MINIATURIZATION; MODELS, THEORETICAL; REFRACTOMETRY; SILICON;

MLCS; MLOWN;

EID: 84874068124     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.002378     Document Type: Article

References (26)

1. C. Zener, "Internal friction in solids. Pt. II: general theory of thermoelastic internal friction", Phys. Rev. 53(1), 90-99 (1938).
2. D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, "Measurements of the mechanical Q of single-crystal silicon at low temperatures", J. Low Temp. Phys. 30(5-6), 621-629 (1978).
3. F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, "Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal", Phys. Rev. Lett. 104(16), 163903 (2010).
4. G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, "Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings", Class. Quantum Gravity 19(5), 897-917 (2002).
5. D. Kleckner and D. Bouwmeester, "Sub-kelvin optical cooling of a micromechanical resonator", Nature 444(7115), 75-78 (2006).
6. O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, "Radiation-pressure cooling and optomechanical instability of a micromirror", Nature 444(7115), 71-74 (2006).
7. H. Mabuchi and A. C. Doherty, "Cavity quantum electrodynamics: coherence in context", Science 298(5597), 1372-1377 (2002).
8. K. J. Vahala, "Optical microcavities", Nature 424(6950), 839-846 (2003).
9. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, "Ultra-high-Q toroid microcavity on a chip", Nature 421(6926), 925-928 (2003).
10. D. W. Vernooy, V. S. Ilchenko, H. Mabuchi, E. W. Streed, and H. J. Kimble, "High-Q measurements of fusedsilica microspheres in the near infrared", Opt. Lett. 23(4), 247-249 (1998).
11. D. R. Burnham and D. McGloin, "Holographic optical trapping of aerosol droplets", Opt. Express 14(9), 4176-4182 (2006).
12. D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, Jr., and C. Bustamante, "Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies", Nature 437(7056), 231-234 (2005).
13. W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, "Refractive index measurement of single living cells using on-chip Fabry-Perot cavity", Appl. Phys. Lett. 89(20), 203901 (2006).
14. S. Kassi, M. Chenevier, L. Gianfrani, A. Salhi, Y. Rouillard, A. Ouvrard, and D. Romanini, "Looking into the volcano with a mid-IR DFB diode laser and cavity enhanced absorption spectroscopy", Opt. Express 14(23), 11442-11452 (2006).
15. J. M. Langridge, T. Laurila, R. S. Watt, R. L. Jones, C. F. Kaminski, and J. Hult, "Cavity enhanced absorption spectroscopy of multiple trace gas species using a supercontinuum radiation source", Opt. Express 16(14), 10178-10188 (2008).
16. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, "In-plane microelectromechanical resonator with integrated Fabry-Perot cavity", Appl. Phys. Lett. 92(8), 081101 (2008).
17. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, "Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors", Opt. Lett. 32(5), 533-535 (2007).
18. B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, "Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon", J. Sel. Top. Quantum Electron. 12(6), 1480-1488 (2006).
19. R. St-Gelais, J. Masson, and Y.-A. Peter, "All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems", Appl. Phys. Lett. 94(24), 243905 (2009).
20. A. Lipson and E. M. Yeatman, "A 1-D photonic band gap tunable optical filter in (110) silicon", J. Microelectromech. Syst. 16(3), 521-527 (2007).
21. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, "Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro-and nanostructures", Microelectron. J. 36(7), 673-677 (2005).
22. A. Yariv, Quantum Electronics (Wiley, New York, USA 1989).
23. M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, "Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor", Appl. Phys. Lett. 98(21), 211113 (2011).
24. M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, "Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry-Perot cavities", J. Microelectromech. Syst. 21(1), 171-180 (2012).
25. M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, "Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers", AIP Adv 2(2), 022143 (2012).
26. T. Verdeyen, Laser Electronics (Prentice Hall, 1995).