In-plane microelectromechanical resonator with integrated Fabry-Ṕrot cavity

Applied Physics Letters

Volumn 92, Issue 8, 2008, Pages

  Pruessner, Marcel W ^a   Stievater, Todd H ^b   Rabinovich, William S ^b  

^a SFA INC   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED BRAGG REFLECTORS; ELECTROSTATIC ACTUATORS; FABRY-PEROT INTERFEROMETERS; MICROCAVITIES; RESONATORS; SILICON ON INSULATOR TECHNOLOGY;

MICROBRIDGE RESONATORS; MICROELECTROMECHANICAL RESONATORS; THERMALMECHANICAL NOISE;

MEMS;

EID: 40049099885     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2883874     Document Type: Article

References (15)

1. M. C. Wu, O. Solgaard, and J. E. Ford, J. Lightwave Technol. JLTEDG 0733-8724 10.1109/JLT.2006.886405 24, 4433 (2006).
2. M. Garrigues, J. Danglot, J.-L. Leclercq, and O. Parillaud, IEEE Photonics Technol. Lett. IPTLEL 1041-1135 10.1109/LPT.2005.848401 17, 1471 (2005).
3. E. C. Vail, M. S. Wu, G. S. Li, L. Eng, and C. J. Chang-Hasnain, Electron. Lett. ELLEAK 0013-5194 10.1049/el:19950102 31, 228 (1995).
4. C. K. Madsen, J. A. Walker, J. E. Ford, K. W. Goossen, T. N. Nielsen, and G. Lenz, IEEE Photonics Technol. Lett. IPTLEL 1041-1135 10.1109/68.849073 12, 651 (2000).
5. B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, IEEE J. Sel. Top. Quantum Electron. IJSQEN 1077-260X 10.1109/JSTQE.2006.884082 12, 1480 (2006).
6. A. Lipson and E. M. Yeatman, J. Microelectromech. Syst. JMIYET 1057-7157 16, 521 (2007).
7. J. McGee, N. Siwak, B. Morgan, and R. Ghodssi, Proceedings of the 2005 International Semiconductor Device Research Symposium 2005, Vol. 56.
8. T. H. Stievater, W. S. Rabinovich, M. S. Ferraro, N. A. Papanicolaou, J. B. Boos, R. A. McGill, J. L. Stepnowski, and E. J. Houser, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2344936 89, 091125 (2006).
9. C. Höhberger Metzger and K. Karrai, Nature (London) NATUAS 0028-0836 10.1038/nature03118 432, 1002 (2004).
10. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, Opt. Lett. OPLEDP 0146-9592 10.1364/OL.32.000533 32, 533 (2007).
11. FULLWAVE Version 7, RSoft Design Group, Inc: Ossining, NY.
12. T. B. Gabrielson, IEEE Trans. Electron Devices IETDAI 0018-9383 10.1109/16.210197 40, 903 (1993).
13. T. H. Stievater, W. S. Rabinovich, H. S. Newman, R. Mahon, P. G. Goetz, J. L. Ebel, and D. J. McGee, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1505122 81, 1779 (2002).
14. COMSOL Multiphysics Version 3.2.0, COMSOL, Inc, Burlington, MA.
15. A. R. Kadam, G. P. Nordin, and M. A. George, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2194128 99, 094905 (2006).