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Volumn 2, Issue 2, 2012, Pages
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Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
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Author keywords
[No Author keywords available]
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Indexed keywords
FIBER OPTIC SENSORS;
INTERFEROMETRY;
MICROCAVITIES;
MICROMETERS;
REFLECTION;
WAVE INTERFERENCE;
CURVED REFLECTORS;
DIELECTRIC LAYER;
DIMENSIONAL MEASUREMENTS;
DISTRIBUTED REFLECTORS;
NUMBER OF LAYERS;
OPTICAL LOW COHERENCE INTERFEROMETRIES;
PHASE SENSITIVE;
PHYSICAL LENGTH;
THICKNESS MEASUREMENT;
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EID: 84874057844
PISSN: None
EISSN: 21583226
Source Type: Journal
DOI: 10.1063/1.4727741 Document Type: Article |
Times cited : (8)
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References (17)
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