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Volumn 2, Issue 2, 2012, Pages

Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers

Author keywords

[No Author keywords available]

Indexed keywords

FIBER OPTIC SENSORS; INTERFEROMETRY; MICROCAVITIES; MICROMETERS; REFLECTION; WAVE INTERFERENCE;

EID: 84874057844     PISSN: None     EISSN: 21583226     Source Type: Journal    
DOI: 10.1063/1.4727741     Document Type: Article
Times cited : (8)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.