메뉴 건너뛰기




Volumn 740-742, Issue , 2013, Pages 545-548

Evaluation of PBTS and NBTS in SiC MOS using in situ charge pumping measurements

Author keywords

BTS; Charge pumping; Interface traps; MOSFET; Oxide traps; Reliability

Indexed keywords

CHARGE TRAPPING; DEGRADATION; MOS DEVICES; MOSFET DEVICES; POWER SEMICONDUCTOR DEVICES; RELIABILITY; SILICON CARBIDE; THRESHOLD VOLTAGE;

EID: 84874031616     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.740-742.545     Document Type: Conference Paper
Times cited : (15)

References (13)
  • 1
    • 77954624967 scopus 로고    scopus 로고
    • MOS Characteristics of C-Face 4H-SiC
    • Z. Chen et al., MOS Characteristics of C-Face 4H-SiC, J. Elec. Mat. 39 (2010) 526-529.
    • (2010) J. Elec. Mat , vol.39 , pp. 526-529
    • Chen, Z.1
  • 2
    • 36248979192 scopus 로고    scopus 로고
    • Bias-stress induced threshold voltage and drain current instability in 4H-SiC DMOSFETs
    • T. Okayama et al., Bias-stress induced threshold voltage and drain current instability in 4H-SiC DMOSFETs, Solid-State Elec. 52 (2008) 164-170.
    • (2008) Solid-State Elec , vol.52 , pp. 164-170
    • Okayama, T.1
  • 3
    • 34547335302 scopus 로고    scopus 로고
    • Evidence of negative bias temperature instability in 4H-SiC metal oxide semiconductor capacitors
    • M.J. Marinella et al., Evidence of negative bias temperature instability in 4H-SiC metal oxide semiconductor capacitors, Appl. Phys. Lett. 90 (2007) 253508.
    • (2007) Appl. Phys. Lett , vol.90 , pp. 253508
    • Marinella, M.J.1
  • 4
    • 63849231714 scopus 로고    scopus 로고
    • Temperature-Dependence of SiC MOSFET Threshold-Voltage Instability
    • A.J. Lelis et al., Temperature-Dependence of SiC MOSFET Threshold-Voltage Instability, Mat. Sci. Forum 600-603 (2009) 807-810.
    • (2009) Mat. Sci. Forum , vol.600-603 , pp. 807-810
    • Lelis, A.J.1
  • 5
    • 79955113871 scopus 로고    scopus 로고
    • Understanding the Inversion-Layer Properties of the 4H-SiC/SiO2 Interface
    • K. Matocha, V. Tilak, Understanding the Inversion-Layer Properties of the 4H-SiC/SiO2 Interface, Mat. Sci. Forum 679-680 (2011) 318-325.
    • (2011) Mat. Sci. Forum , vol.679-680 , pp. 318-325
    • Matocha, K.1    Tilak, V.2
  • 6
    • 79959304683 scopus 로고    scopus 로고
    • Application of reliability test standards to SiC Power MOSFETs
    • EX.2.1-EX.2.9
    • R. Green, A. Lelis, D. Habersat, Application of reliability test standards to SiC Power MOSFETs, Proc. IEEE Int. Rel. Phys. Symp. (2011) EX.2.1-EX.2.9.
    • (2011) Proc. IEEE Int. Rel. Phys. Symp
    • Green, R.1    Lelis, A.2    Habersat, D.3
  • 7
    • 49249110238 scopus 로고    scopus 로고
    • Time Dependence of Bias-Stress-Induced SiC MOSFET Threshold-Voltage Instability Measurements
    • A.J. Lelis et al., Time Dependence of Bias-Stress-Induced SiC MOSFET Threshold-Voltage Instability Measurements, IEEE Trans. Elec. Dev. 55 (2008) 1835-1840.
    • (2008) IEEE Trans. Elec. Dev , vol.55 , pp. 1835-1840
    • Lelis, A.J.1
  • 8
    • 84980471059 scopus 로고    scopus 로고
    • Effect of ON-State Stress on SiC DMOSFET Subthreshold I-V Characteristics
    • A.J. Lelis et al., Effect of ON-State Stress on SiC DMOSFET Subthreshold I-V Characteristics, Mat. Sci. Forum 645-648 (2010) 983-986.
    • (2010) Mat. Sci. Forum , vol.645-648 , pp. 983-986
    • Lelis, A.J.1
  • 9
    • 79955102231 scopus 로고    scopus 로고
    • High-Temperature Reliability of SiC Power MOSFETs
    • A.J. Lelis, R. Green, D.B. Habersat, High-Temperature Reliability of SiC Power MOSFETs, Mat. Sci. Forum 679-680 (2011) 599-602.
    • (2011) Mat. Sci. Forum , vol.679-680 , pp. 599-602
    • Lelis, A.J.1    Green, R.2    Habersat, D.B.3
  • 10
    • 21544480403 scopus 로고
    • Effects of oxide traps, interface traps, and "border traps" on metal-oxide-semiconductor devices
    • D.M. Fleetwood et al., Effects of oxide traps, interface traps, and "border traps" on metal-oxide-semiconductor devices, J. Appl. Phys. 73 (1993) 5058-5074.
    • (1993) J. Appl. Phys , vol.73 , pp. 5058-5074
    • Fleetwood, D.M.1
  • 11
    • 0031378732 scopus 로고    scopus 로고
    • In-depth exploration of Si-SiO2 interface traps in MOS transistors using the charge pumping technique
    • D. Bauza, Y. Maneglia, In-depth exploration of Si-SiO2 interface traps in MOS transistors using the charge pumping technique, IEEE Trans. Elec. Dev. 44 (1997) 2262-2266.
    • (1997) IEEE Trans. Elec. Dev , vol.44 , pp. 2262-2266
    • Bauza, D.1    Maneglia, Y.2
  • 12
    • 0016927294 scopus 로고
    • The use of charge pumping currents to measure surface state densities in MOS transistors
    • A.B.M. Elliot, The use of charge pumping currents to measure surface state densities in MOS transistors, Solid-State Elec. 19 (1976) 241-247.
    • (1976) Solid-State Elec , vol.19 , pp. 241-247
    • Elliot, A.B.M.1
  • 13
    • 0024705114 scopus 로고
    • Analysis of the charge pumping technique and its application for the evaluation of MOSFET degradation
    • P. Heremans et al., Analysis of the charge pumping technique and its application for the evaluation of MOSFET degradation, IEEE Trans. Elec. Dev. 36 (1989) 1318-1335.
    • (1989) IEEE Trans. Elec. Dev , vol.36 , pp. 1318-1335
    • Heremans, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.