Study of humidity sensors based on nanostructured carbon films produced by physical vapor deposition

Sensors and Actuators, B: Chemical

Volumn 178, Issue , 2013, Pages 508-513

  Chu, Jin ^a   Peng, Xiaoyan ^a   Feng, Peter ^a   Sheng, Yong ^b   Zhang, Jianting ^b  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b SICHUAN UNIVERSITY   (China)

Author keywords

Humidity sensors; Nanostructured carbon; Physical vapor deposition

Indexed keywords

ALTERNATIVE CURRENT; AU ELECTRODES; CARBON NANOSHEETS; DIRECT CURRENT; FOUR-POINT; HOT FILAMENT; LONG TERM STABILITY; NANOSTRUCTURED CARBON FILMS; NANOSTRUCTURED CARBONS; ROOM TEMPERATURE; SENSING PROPERTY; SENSING RESPONSE; SI(1 0 0); VAPOR-DEPOSITION TECHNIQUES;

CARBON; GOLD; HUMIDITY SENSORS; METHANE; NANOSHEETS; PHYSICAL VAPOR DEPOSITION; VAPORS;

CARBON FILMS;

EID: 84873832075     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.12.104     Document Type: Article

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