Fabrication of a microscale device for detection of nitroaromatic compounds

Journal of Microelectromechanical Systems

Volumn 22, Issue 1, 2013, Pages 54-61

  Petruczok, Christy D ^a   Choi, Hyungryul J ^a   Yang, Se Young ^a,b   Asatekin, Ayse ^a,c   Gleason, Karen K ^a   Barbastathis, George ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b Invensas Corporation   (United States)

^c Clean Membranes Inc   (United States)

Author keywords

Microsensors; polymer films; thin films; thin film sensors

Indexed keywords

2 ,4 ,6-TRINITROTOLUENE; ANALYTES; DEVICE ARRAYS; DEVICE DESIGN; LIMITS OF DETECTION; MICRO-SCALES; MICROSCALE DEVICES; MICROSCALE SENSORS; NANOSCALE METALS; NITROAROMATIC COMPOUND; POLYMER LAYERS; POLYMERIC DEVICES; PROOF OF CONCEPT; SMALL AREA; THIN FILM SENSORS;

AROMATIC COMPOUNDS; CHEMICAL VAPOR DEPOSITION; LITHOGRAPHY; MICROSENSORS; POLYMER FILMS; SENSORS; THIN FILMS;

POLYMERS;

EID: 84873303016     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2212421     Document Type: Article

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