Molecular depth profiling

Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 3-8

  Winograd, Nicholas ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

C60; cluster ion beams; depth profiling; imaging; SIMS

Indexed keywords

ANGLE OF INCIDENCE; C60; CHEMICAL DAMAGES; CHEMICAL PROCESS; CLUSTER ION BEAMS; DAMAGE ACCUMULATION; DEPTH PROFILE; EXPERIMENTAL CONDITIONS; INORGANIC MATERIALS; MOLECULAR DEPTH PROFILING; MOLECULAR INFORMATION; MOLECULAR IONS; MOLECULAR LEVELS; MOLECULAR SOLID; PARAMETERIZING; POLYATOMIC PROJECTILE; QUANTITATIVE CHARACTERIZATION;

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; IMAGING TECHNIQUES; KINETICS; MOLECULAR DYNAMICS; PROJECTILES; SECONDARY ION MASS SPECTROMETRY;

DEPTH PROFILING;

EID: 84872866223     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.4913     Document Type: Conference Paper

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