A MEMS electrochemical bellows actuator for fluid metering applications

Biomedical Microdevices

Volumn 15, Issue 1, 2013, Pages 37-48

  Sheybani, Roya ^a   Gensler, Heidi ^a   Meng, Ellis ^a  

^a University of Southern California   (United States)

Author keywords

Fluid metering; MEMS electrochemical bellows actuators; Patient tailored site specific drug delivery devices; Wireless powering

Indexed keywords

APPLIED CURRENT; BACK PRESSURES; CLASS-D; DELIVERY PERFORMANCE; DRUG DELIVERY APPLICATIONS; DRUG DELIVERY DEVICES; EFFECTS OF TEMPERATURE; INDUCTIVE POWERING; PARYLENES; PT ELECTRODE; WIRELESS MEMS;

BELLOWS; DRUG DELIVERY; FLOW RATE; FLOWMETERS; PLATINUM;

ACTUATORS;

DEIONIZED WATER; UNCLASSIFIED DRUG; WATER;

ANALYTICAL EQUIPMENT; ARTICLE; BELLOWS ACTUATOR; CHEMICAL PARAMETERS; CONCENTRATION (PARAMETERS); DRUG DELIVERY SYSTEM; ELECTRIC CURRENT; ELECTROCHEMISTRY; ELECTRODE; ELECTROLYSIS; ENERGY RESOURCE; EQUIPMENT DESIGN; FLOW RATE; FLUID METERING; GAS; GAS RECOMBINATION; INTERMETHOD COMPARISON; LIQUID; MICROTECHNOLOGY; PRESSURE MEASUREMENT; PRIORITY JOURNAL; PRODUCTIVITY; PUMP; RELIABILITY; TEMPERATURE; VISCOSITY;

BODY TEMPERATURE; DRUG DELIVERY SYSTEMS; ELECTRODES; ELECTROLYSIS; EQUIPMENT DESIGN; FLUOROCARBON POLYMERS; HYDRODYNAMICS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; PRESSURE; VISCOSITY; WIRELESS TECHNOLOGY;

EID: 84872608420     PISSN: 13872176     EISSN: 15728781     Source Type: Journal    
DOI: 10.1007/s10544-012-9685-0     Document Type: Article

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