High-efficiency MEMS electrochemical actuators and electrochemical impedance spectroscopy characterization

Journal of Microelectromechanical Systems

Volumn 21, Issue 5, 2012, Pages 1197-1208

  Sheybani, Roya ^a   Meng, Ellis ^a  

^a University of Southern California   (United States)

Author keywords

Electrochemical impedance spectroscopy (EIS); high efficiency microelectromechanical systems (MEMS) electrochemical actuators

Indexed keywords

ACTUATOR PERFORMANCE; BIOMEDICAL APPLICATIONS; COATING THICKNESS; ELECTROCHEMICAL ACTUATORS; ELECTROCHEMICAL CLEANING; ELECTROLYTE COATINGS; FLEXIBLE SUBSTRATE; HIGH-FLOW RATE; NAFION COATING; PARYLENES; SODA LIME GLASS; SURFACE AREA;

COATINGS; DRUG DELIVERY; EFFICIENCY; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTRODES; ELECTROLYTIC CLEANING; ELECTROMECHANICAL DEVICES; ELECTROPLATING; ETHERS; FLOW RATE; GLASS; MEDICAL APPLICATIONS; MEMS; SPECTROSCOPY; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

ACTUATORS;

EID: 84867097092     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2203103     Document Type: Article

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