Rapid non-lithography based fabrication process and characterization of Parylene C bellows for applications in MEMS electrochemical actuators

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2347-2350

  Gensler, H ^a   Sheybani, R ^a   Meng, E ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

actuator; bellows; electrochemical; Parylene C

Indexed keywords

ANALYTICAL MODEL; CONSTANT CURRENT; CONSTANT FLOW RATES; CONVOLUTION NUMBER; DRUG RESERVOIR; ELECTROCHEMICAL; ELECTROCHEMICAL ACTUATORS; FABRICATION PROCESS; FINITE ELEMENT MODELING; LOAD DEFLECTION; LOAD RESPONSE; MECHANICAL CHARACTERIZATIONS; MEMBRANE DEFLECTIONS; PARYLENE C; SILICONE RUBBER;

ACTUATORS; BELLOWS; COMPUTER SIMULATION; CONVOLUTION; DRUG DELIVERY; FINITE ELEMENT METHOD; LOAD TESTING; MATHEMATICAL MODELS; MICROSYSTEMS; SILICONES; SOLID-STATE SENSORS;

COUPLINGS;

EID: 80052122884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969553     Document Type: Conference Paper

References (13)

1. J. F. Wilson, "Mechanics of bellows: A critical survey" International Journal of Mechanical Sciences, vol. 26, no. 11-12, pp. 593-605, 1984.
2. M. Di Giovanni, Flat and corrugated diaphragm design handbook. New York: M. Dekker, 1982.
3. R. Luharuka, C.-F. Wu, and P. J. Hesketh, "Design, fabrication, and testing of a near constant pressure fuel delivery system for miniature fuel cells" Sensors and Actuators A: Physical, vol. 112, no. 2-3, pp. 187-195, May 2004.
4. G. Bonanomi et al., "Microelectromechanical systems for endoscopic cardiac surgery" The Journal of Thoracic and Cardiovascular Surgery, vol. 126, no. 3, pp. 851-852, Sep. 2003.
5. G.H. Feng, "Universal concept for fabricating micron to millimeter sized 3-D parylene structures on rigid and flexible substrates" Proceedings, MEMS Conference, Kyoto, pp. 594-597, 2003.
6. P.Y. Li, R. Sheybani, C. Gutierrez, J.T.W. Kuo, and E. Meng, "A Parylene bellows electrochemical actuator" J. Microelectromech. Syst., 19, 2010, pp. 215-228.
7. X. Yang, Y.C. Tai, and C.M. Ho, "Micro bellow actuators" Solid State Sensors and Actuators, Transducers Conference, Chicago, vol. 1, pp. 45-48, 1997.
8. S. Matsui , T. Kaito , J.-I. Fujita , M. Komuro , K. Kanda and Y. Haruyama "Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition", J. Vac. Sci. Technol. B, Microelectron. Process. Phenom., vol. 18, pp. 3181 2000.
9. H. Gensler, R. Sheybani, P.Y. Li, R. Lo, S. Zhu, K.T. Yong, I. Roy, P.N. Prasad, R. Masood, U.K. Sinha, E. Meng, "Implantable MEMS drug delivery device for cancer radiation reduction" Proceedings, MEMS Conference, Hong Kong, pp. 23-26, 2010.
10. T. Harder, Tze-Jung Yao, Qing He, Chi-Yuan Shih, and Yu-Chong Tai, "Residual stress in thin-film parylene-c" Proceedings, MEMS Conference, Las Vegas, pp. 435-438, 2002.
11. C. Shih, T. Harder, and Y. Tai, "Yield strength of thin-film parylene-C" Microsystem Technologies, vol. 10, no. 5, pp. 407-411, Aug. 2004.
12. X. Wu, "A reconfigurable tactile display based on polymer MEMS technology" Ph.D. Dissertation, Georgia Institute of Technology, 2008.
13. R. Sheybani, and E. Meng, "High efficiency wireless electrochemical actuators: design, fabrication and characterization by electrochemical impedance spectroscopy", MEMS Conference, Cancun, Jan. 23-27, 2011.