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Japanese Journal of Applied Physics

Volumn 51, Issue 12, 2012, Pages

Influence of chemical bonding states on electrical properties of amorphous carbon nitride films

(5) Tamura, Naoyuki a Aono, Masami a Kishimura, Hiroaki a Kitazawa, Nobuaki a Watanabe, Yoshihisa a

a NATIONAL DEFENSE ACADEMY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON NITRIDE FILMS; BONDING STATE; CHEMICAL BONDING STATE; DEPOSITION TEMPERATURES; ELECTRICAL RESISTIVITY; GRAPHITE-LIKE STRUCTURES; NITROGEN CONCENTRATIONS; RF MAGNETRON SPUTTERING METHOD;

AMORPHOUS CARBON; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; NITRIDES; PHOTOELECTRONS; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL BONDS;

EID: 84872562367 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.121401 Document Type: Article

Times cited : (8)

References (22)

1
- 20444373328
- A. Y. Liu and M. L. Cohen: Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 0000583751
- H. Q. Lou, N. Axen, R. E. Somekh, and I. M. Hutchings: Diamond Relat. Mater. 5 (1996) 1303.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1303
- Lou, H.Q.¹ Axen, N.² Somekh, R.E.³ Hutchings, I.M.⁴

3
- 0032691245
- W.-C. Chan, M.-K. Fung, K.-H. Lai, I. Bello, S.-T. Lee, and C.-S. Lee: J. Non-Cryst. Solids 254 (1999) 180.
- (1999) J. Non-Cryst. Solids , vol.254 , pp. 180
- Chan, W.-C.¹ Fung, M.-K.² Lai, K.-H.³ Bello, I.⁴ Lee, S.-T.⁵ Lee, C.-S.⁶

4
- 9644302436
- J. Neidhardt, L. Hultman, E. Broitman, T. W. Scharf, and I. L. Singer: Diamond Relat. Mater. 13 (2004) 1882.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1882
- Neidhardt, J.¹ Hultman, L.² Broitman, E.³ Scharf, T.W.⁴ Singer, I.L.⁵

5
- 34248351212
- Z. H. Huang, B. Yang, C. S. Liu, L. P. Guo, X. J. Fan, and D. J. Fu: Mater. Lett. 61 (2007) 3443.
- (2007) Mater. Lett. , vol.61 , pp. 3443
- Huang, Z.H.¹ Yang, B.² Liu, C.S.³ Guo, L.P.⁴ Fan, X.J.⁵ Fu, D.J.⁶

6
- 0343215213
- N. Hellgren, M. P. Johansson, E. Broitman, L. Hultman, and J. E. Sundgren: Phys. Rev. B 59 (1999) 5162.
- (1999) Phys. Rev. B , vol.59 , pp. 5162
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Hultman, L.⁴ Sundgren, J.E.⁵

7
- 0034205906
- M. Aono, S. Nitta, T. Katsuno, T. Itoh, and S. Nonomura: Appl. Surf. Sci. 159-160 (2000) 341.
- (2000) Appl. Surf. Sci. , vol.159-160 , pp. 341
- Aono, M.¹ Nitta, S.² Katsuno, T.³ Itoh, T.⁴ Nonomura, S.⁵

8
- 0037101058
- D. Papadimitriou, G. Roupakas, C. A. Dimitriadis, and S. Logothetidis: J. Appl. Phys. 92 (2002) 870.
- (2002) J. Appl. Phys. , vol.92 , pp. 870
- Papadimitriou, D.¹ Roupakas, G.² Dimitriadis, C.A.³ Logothetidis, S.⁴

9
- 0036508196
- M. Aono and S. Nitta: Diamond Relat. Mater. 11 (2002) 1219.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1219
- Aono, M.¹ Nitta, S.²

10
- 0032608058
- T. Iwasaki, M. Aono, S. Nitta, H. Habuchi, T. Itoh, and S. Nonomura: Diamond Relat. Mater. 8 (1999) 440.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 440
- Iwasaki, T.¹ Aono, M.² Nitta, S.³ Habuchi, H.⁴ Itoh, T.⁵ Nonomura, S.⁶

11
- 0032640935
- M. Zhang, Y. Nakayama, and M. Kume: Solid State Commun. 110 (1999) 679.
- (1999) Solid State Commun , vol.110 , pp. 679
- Zhang, M.¹ Nakayama, Y.² Kume, M.³

12
- 80051793682
- M. Aono, T. Goto, N. Tamura, N. Kitazawa, and Y. Watanabe: Diamond Relat. Mater. 20 (2011) 1208.
- (2011) Diamond Relat. Mater. , vol.20 , pp. 1208
- Aono, M.¹ Goto, T.² Tamura, N.³ Kitazawa, N.⁴ Watanabe, Y.⁵

13
- 84869134613
- C. Iwasaki, M. Aono, N. Tamura, N. Kitazawa, and Y. Watanabe: Jpn. J. Appl. Phys. 51 (2012) 10NE26.
- (2012) Jpn. J. Appl. Phys. , vol.51
- Iwasaki, C.¹ Aono, M.² Tamura, N.³ Kitazawa, N.⁴ Watanabe, Y.⁵

14
- 2442447094
- S. E. Rodil and S. Muhl: Diamond Relat. Mater. 13 (2004) 1521.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1521
- Rodil, S.E.¹ Muhl, S.²

15
- 0038208253
- A. C. Ferrari, S. E. Rodil, and J. Robertson: Phys. Rev. B 67 (2003) 155306.
- (2003) Phys. Rev. B , vol.67 , pp. 155306
- Ferrari, A.C.¹ Rodil, S.E.² Robertson, J.³

16
- 12044253618
- D. Marton, K. J. Boyed, A. H. Al-Bayati, S. S. Todrov, and J. W. Rabalais: Phys. Rev. Lett. 73 (1994) 118.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyed, K.J.² Al-Bayati, A.H.³ Todrov, S.S.⁴ Rabalais, J.W.⁵

17
- 4243363393
- D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson: Phys. Rev. B 30 (1984) 870.
- (1984) Phys. Rev. B , vol.30 , pp. 870
- Beeman, D.¹ Silverman, J.² Lynds, R.³ Anderson, M.R.⁴

18
- 0242603790
- A. C. Ferrari and J. Robertson: Phys. Rev. B 61 (2000) 14095.
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

19
- 0036508145
- A. C. Ferrari: Diamond Relat. Mater. 11 (2002) 1053.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1053
- Ferrari, A.C.¹

20
- 54049119229
- G. Lazar, B. Bouchet-Fabre, K. Zellama, M. Clin, D. Ballutaud, and C. Godet: J. Appl. Phys. 104 (2008) 073534.
- (2008) J. Appl. Phys. , vol.104 , pp. 073534
- Lazar, G.¹ Bouchet-Fabre, B.² Zellama, K.³ Clin, M.⁴ Ballutaud, D.⁵ Godet, C.⁶

21
- 0000244478
- A. C. Ferrari, B. Kleinsorge, G. Adamopoulos, J. Robertson, W. I. Milne, V. Stolojan, L. M. Brown, A. LiBassi, and B. K. Tanner: J. Non-Cryst. Solids 266-269 (2000) 765.
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 765
- Ferrari, A.C.¹ Kleinsorge, B.² Adamopoulos, G.³ Robertson, J.⁴ Milne, W.I.⁵ Stolojan, V.⁶ Brown, L.M.⁷ Libassi, A.⁸ Tanner, B.K.⁹

22
- 0032288837
- C. Spaeth, M. Kuhn, F. Richter, U. Falke, M. Hietschold, R. Kilper, and U. Kreissig: Diamond Relat. Mater. 7 (1998) 1727.
- (1998) Diamond Relat. Mater. , vol.7 , pp. 1727
- Spaeth, C.¹ Kuhn, M.² Richter, F.³ Falke, U.⁴ Hietschold, M.⁵ Kilper, R.⁶ Kreissig, U.⁷

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