Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam

Applied Physics A: Materials Science and Processing

Volumn 110, Issue 1, 2013, Pages 179-188

  Ishino, Masahiko ^a   Faenov, Anatoly Y ^a,b   Tanaka, Momoko ^a   Tamotsu, Satoshi ^c   Hasegawa, Noboru ^a   Nishikino, Masaharu ^a   Pikuz, Tatiana A ^a,b   Kaihori, Takeshi ^a   Kawachi, Tetsuya ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b JOINT INSTITUTE FOR HIGH TEMPERATURES   (Russian Federation)

^c NARA WOMEN'S UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE (AFM); ATTENUATION LENGTHS; BEAM IRRADIATION; CONICAL STRUCTURES; CU SURFACES; DEEP HOLES; MATERIAL SURFACE; MULTIPLE PULSE; MULTIPLE-PULSE IRRADIATION; PICOSECONDS; PULSE EXPOSURE; SCANNING ELECTRON MICROSCOPE; SI SURFACES; SINGLE-PULSE IRRADIATION; SOFT X-RAY LASER; SURFACE BEHAVIOR; X RAY PHOTONS; X-RAY LASER BEAMS;

ATOMIC FORCE MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE PROPERTIES; X RAY LASERS; X RAYS;

IRRADIATION;

EID: 84872352894     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-012-7100-6     Document Type: Article

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