Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2836-2843

  Guan, Y F ^a   Pedraza, A J ^a   Fowlkes, J D ^a   Joy, D A ^a  

^a University of Tennessee Knoxville   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRATING EQUATIONS; NANOPARTICLES; NANOPROTRUSIONS; WAVE VECTORS;

ACTIVATION ENERGY; ANNEALING; ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; EMISSION SPECTROSCOPY; LASER BEAM EFFECTS; LASERS; MIRRORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; STRESSES; SURFACE TENSION; ULTRAVIOLET RADIATION; VECTORS;

NANOSTRUCTURED MATERIALS;

EID: 13244263116     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1821576     Document Type: Article

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