Capacitive humidity sensing properties of ZnO cauliflowers grown on silicon nanoporous pillar array

Sensors and Actuators, B: Chemical

Volumn 177, Issue , 2013, Pages 740-744

  Wang, Ling Li ^a   Wang, Hai Yan ^a   Wang, Wen Chuang ^a   Li, Kun ^a   Wang, Xin Chang ^a   Li, Xin Jian ^a  

^a ZHENGZHOU UNIVERSITY   (China)

Author keywords

Capacitive humidity sensor; Chemical vapor deposition; Silicon nanoporous pillar array (Si NPA); Zinc oxide (ZnO) cauliflower array

Indexed keywords

AMBIENT AIR; AVERAGE DIAMETER; CANDIDATE MATERIALS; CAPACITIVE HUMIDITY SENSING; CAPACITIVE HUMIDITY SENSORS; CHEMICAL VAPOR DEPOSITION METHODS; FLOWER BUDS; HUMIDITY SENSING PROPERTY; LONG TERM STABILITY; MEASURING FREQUENCY; RECOVERY TIME; REGULAR ARRAY; RELATIVE STANDARD DEVIATIONS; ROOM TEMPERATURE; SILICON NANOPOROUS PILLAR ARRAY; SUBMICRON-SIZED; ZINC OXIDE (ZNO); ZNO;

CAPACITANCE; CHEMICAL VAPOR DEPOSITION; HUMIDITY SENSORS; SILICON; VAPORS;

ZINC OXIDE;

EID: 84871776350     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.11.070     Document Type: Article

References (36)

1. Z.M. Rittersma Recent achievements in miniaturized humidity sensors-a review of transduction techniques Sensors and Actuators A 96 2002 196 210 (Pubitemid 34247345)
2. C.Y. Lee, and G.B. Lee Humidity sensors: a review Sensor Letters 3 2005 1 15
3. K.M. Willett, N.P. Gillett, P.D. Jones, and P.W. Thorne Attribution of observed surface humidity changes to human influence Nature 449 2007 710 712 (Pubitemid 47552098)
4. J.J. Steele, M.T. Taschuk, and M.J. Brett Response time of nanostructured relative humidity sensors Sensors and Actuators B 140 2009 610 615
5. O.K. Varghese, and C.A. Grimes Metal oxide nanoarchitectures for environmental sensing Journal of Nanoscience and Nanotechnology 3 2003 277 293 (Pubitemid 38597290)
6. Y. Li, Y. Chen, C. Zhang, T. Xue, and M. Yang A humidity sensor based on interpenetrating polymer network prepared from poly (dimethylaminoethyl methacrylate) and poly (glycidyl methacrylate) Sensors and Actuators B 125 2007 131 137 (Pubitemid 47017669)
7. C.W. Lee, H.S. Park, J.G. Kim, B.K. Choi, S.W. Joo, and M.S. Gong Polymeric humidity sensor using organic/inorganic hybrid polyelectrolytes Sensors and Actuators B 109 2005 315 322
8. Y. Li, M.J. Yang, and Y. She Humidity sensors using in situ synthesized sodium polystyrenesulfonate/ZnO nanocomposites Talanta 62 2004 707 712
9. T. Wagner, S. Krotzky, A. Weiss, T. Sauerwald, C.D. Kohl, J. Roggenbuck, and M. Tiemann A high temperature capacitive humidity sensor based on mesoporous silica Sensors 11 2011 3135 3144
10. J.T.W. Yeow, and J.P.M. She Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor Nanotechnology 17 2006 5441 5448 (Pubitemid 46069315)
11. A.I. Buvailo, Y. Xing, J. Hines, N. Dollahon, and E. Borguet TiO2/LiCl-based nanostructured thin film for humidity sensor applications ACS Applied Materials and Interfaces 3 2011 528 533
12. F. Fang, J. Futter, A. Markwitz, and J. Kennedy UV and humidity sensing properties of ZnO nanorods prepared by the arc discharge method Nanotechnology 20 2009 245502
13. A. Zainelabdin, G. Amin, S. Zaman, O. Nur, J. Lu, L. Hultman, and M. Willander CuO/ZnO nanocorals synthesis via hydrothermal technique: growth mechanism and their application as humidity sensor Journal of Materials Chemistry 22 2012 11583 11590
14. M.W. Ahn, K.S. Park, J.H. Heo, J.G. Park, D.W. Kim, K.J. Choi, J.H. Lee, and S.H. Hong Gas sensing properties of defect-controlled ZnO-nanowire gas sensor Applied Physics Letters 93 2008 263103
15. S. Bai, L. Chen, D. Li, W. Yang, P. Yang, Z. Liu, A. Chen, and L. Chung Chiun Different morphologies of ZnO nanorods and their sensing property Sensors and Actuators B 146 2010 129 137
16. J. Huang, Y. Wu, C. Gu, M. Zhai, K. Yu, M. Yang, and J. Liu Large-scale synthesis of flowerlike ZnO nanostructure by a simple chemical solution route and its gas-sensing property Sensors and Actuators B 146 2010 206 212
17. F. Meng, J. Yin, Y.Q. Duan, Z.H. Yuan, and L.J. Bie Co-precipitation synthesis and gas-sensing properties of ZnO hollow sphere with porous shell Sensors and Actuators B 156 2011 703 708
18. J. Huang, Y. Wu, C. Gu, M. Zhai, Y. Sun, and J. Liu Fabrication and gas-sensing properties of hierarchically porous ZnO architectures Sensors and Actuators B 155 2011 126 133
19. Z. Yang, L.M. Li, Q. Wan, Q.H. Liu, and T.H. Wang High-performance ethanol sensing based on an aligned assembly of ZnO nanorods Sensors and Actuators B 135 2008 57 60
20. 2S down to ppb levels at room temperature using sensors based on ZnO nanorods Sensors and Actuators B 113 2006 320 323 (Pubitemid 41831303)
21. Z. Jing, and J. Zhan Fabrication and gas-sensing properties of porous ZnO nanoplates Advanced Materials 20 2008 4547 4551
22. W. Wang, Z. Li, L. Liu, H. Zhang, W. Zheng, Y. Wang, H. Huang, Z. Wang, and C. Wang Humidity sensor based on LiCl-doped ZnO electrospun nanofibers Sensors and Actuators B 141 2009 404 409
23. Y. Qiu, and S. Yang ZnO nanotetrapods: controlled vapor-phase synthesis and application for humidity sensing Advanced Functional Materials 17 2007 1345 1352 (Pubitemid 46847651)
24. H.J. Xu, and X.J. Li Silicon nanoporous pillar array: a silicon hierarchical structure with high light absorption and triple-band photoluminescence Optics Express 16 2008 2933 2941 (Pubitemid 351342513)
25. L.Y. Li, Y.F. Dong, W.F. Jiang, H.F. Ji, and X.J. Li High-performance capacitive humidity sensor based on silicon nanoporous pillar array Thin Solid Films 517 2008 948 951
26. W.F. Jiang, S.H. Xiao, C.Y. Feng, H.Y. Li, and X.J. Li Resistive humidity sensitivity of arrayed multi-wall carbon nanotube nests grown on arrayed nanoporous silicon pillars Sensors and Actuators B 125 2007 651 655 (Pubitemid 47095250)
27. H.Y. Wang, and X.J. Li Structural and capacitive humidity sensing properties of nanocrystal magnetite/silicon nanoporous pillar array Sensors and Actuators B 110 2005 260 263 (Pubitemid 41164280)
28. H.Y. Wang, Y.Q. Wang, Q.F. Hu, and X.J. Li Capacitive humidity sensing properties of SiC nanowires grown on silicon nanoporous pillar array Sensors and Actuators B 166-167 2012 451 456
29. S. Jon, and Wilson Sensor Technology Handbook 2005 Newnes Burlington pp. 271-273
30. L. Greenspan Humidity fixed points of binary saturated aqueous solutions Journal of Research of the National Bureau of Standards 81A 1977 89 96
31. Z. Chen, and C. Lu Humidity sensors: a review of materials and mechanisms Sensor Letters 3 2005 274 295
32. E. Traversa Ceramic sensors for humidity detection: the state-of-the-art and future developments Sensors and Actuators B 23 1995 135 156
33. 3 (0 ≤ x ≤ 0.1) Sensors and Actuators B 99 2004 350 354
34. X. Hu, J. Gong, L. Zhang, and J.C. Yu Continuous size tuning of monodisperse ZnO colloidal nanocrystal clusters by a microwave-polyol process and their application for humidity sensing Advanced Materials 20 2008 4845 4850
35. Q. Qi, T. Zhang, Q.J. Yu, R. Wang, Y. Zeng, L. Liu, and H.B. Yang Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing Sensors and Actuators B 133 2008 638 643
36. 2 composite Sensors and Actuators B 149 2010 413 419