TiO 2/LiCl-based nanostructured thin film for humidity sensor applications

ACS Applied Materials and Interfaces

Volumn 3, Issue 2, 2011, Pages 528-533

  Buvailo, Andrii I ^a,b   Xing, Yangjun ^a   Hines, Jacqueline ^c   Dollahon, Norman ^d   Borguet, Eric ^a  

^a Temple University   (United States)

^b TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV   (Ukraine)

^c Applied Sensor Research and Development Corporation   (United States)

^d VILLANOVA UNIVERSITY   (United States)

Author keywords

Humidity sensors; Lithium chloride; Surface acoustic wave; Thin films; Titanium dioxide

Indexed keywords

CONDUCTOMETRICS; FAST RESPONSE; HUMIDITY SENSING PROPERTY; LITHIUM CHLORIDE; NANOSTRUCTURE FORMATION; NANOSTRUCTURED FILMS; NANOSTRUCTURED THIN FILM; ORGANIC COMPONENTS; PERFORMANCE CHARACTERISTICS; PRECURSOR SOLUTIONS; REPRODUCIBILITIES; SENSOR APPLICATIONS; SENSOR MATERIALS; SENSOR RESPONSE; SENSOR SUBSTRATES; STRAIGHT-FORWARD METHOD; SUBSTRATE SURFACE; SURFACE ACOUSTIC WAVE; SURFACE ACOUSTIC WAVE SENSORS; THICKNESS OF THE FILM; TIO;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ATOMIC FORCE MICROSCOPY; CHLORINE COMPOUNDS; HUMIDITY SENSORS; LITHIUM; NANOPARTICLES; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; SUBSTRATES; SURFACES; THIN FILMS; TITANIUM; TITANIUM DIOXIDE;

CHEMICAL VAPOR DEPOSITION;

LITHIUM CHLORIDE; NANOMATERIAL; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; ELECTRIC CONDUCTIVITY; ENVIRONMENTAL MONITORING; HUMIDITY; INSTRUMENTATION; METHODOLOGY; SCANNING ELECTRON MICROSCOPY;

ELECTRIC CONDUCTIVITY; ENVIRONMENTAL MONITORING; HUMIDITY; LITHIUM CHLORIDE; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES; TITANIUM;

EID: 79957989412     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am1011035     Document Type: Article

References (40)

1. Venugopalan, T.; Yeo, T. L.; Sun, T.; Grattan, K. T. V. IEEE Sens. J. 2008, 8, 1093-1098.
2. Luechinger, N. A.; Loher, S.; Athanassiou, E. K.; Grass, R. N.; Stark, W. J. Langmuir 2007, 23, 3473-3477.
3. Zhang, N.; Yu, K.; Zhu, Z. Q.; Jiang, D. S. Sens. Actuators, A 2008, 143 (2), 245-250.
4. Yamazoe, N.; Shimizu, Y. Sens. Actuators, B 1986, 10, 379-398.
5. Rittersma, Z. M. Sens. Actuators, A 2002, 96, 196-210.
6. Li, Y.; Yang, M. J. Sens. Actuators, B 2002, 86, 155-159.
7. http://www.ist-ag.com/eh/ist-ag/resource.nsf/imgref/Download- 270809-P14-Rapid-EN-V4.3.pdf/$FILE/270809-P14-Rapid-EN- V4.3.pdf.
8. Tetelin, A.; Pellet, C.; Laville, C.; N'Kaoua, G. Sens. Actuators, B 2003, 91, 211-218.
9. Wilson, W. C.; Malocha, D. C.; Kozlovski, N.; Gallagher, D. R.; Fisher, B.; Pavlina, J.; Saldanha, N.; Puccio, D.; Atkinson, G. M. IEEE Sens. J. 2009, 9 (11), 1546-1556.
10. Chen, Z.; Lu, C. Sens. Lett. 2005, 3, 274-295.
11. Sun, A. H.; Huang, L.; Li, Y. Sens. Actuators, B 2009, 139, 543-547.
12. Tai, W. P.; Oh, J. H. Sens. Actuators, B 2002, 85, 154-157.
13. Qi, Q.; Feng, Y. L.; Zhang, T.; Zheng, X. J.; Lu, G. Y. Sens. Actuators, B 2009, 139, 611-617.
14. Hoyt, A. E.; Ricco, A. J.; Bartholomew, J. W.; Osbourn, G. C. Anal. Chem. 1998, 70, 2137-2145.
15. Faia, P. M.; Furtado, C. S.; Ferreira, A. J. Sens. Actuators, B 2004, 101, 183-190.
16. Agarwal, S.; Sharma, G. L. Sens. Actuators, B 2002, 85, 205-211.
17. Steele, J. J.; Taschuk, M. T.; Brett, M. J. IEEE Sens. J. 2008, 8, 1422-1429.
18. Steele, J. J.; Gospodyn, J. P.; Sit, J. C.; Brett, M. J. IEEE Sens. J. 2006, 6, 24-27.
19. Wang, G.; Wang, Q.; Lu, W.; Li, J. H. J. Phys. Chem. B 2006, 110, 22029-22034.
20. Qi, Q.; Zhang, T.; Yu, Q. J.; Wang, R.; Zeng, Y.; Liu, L.; Yang, H. B. Sens. Actuators, B 2008, 133, 638-643.
21. Montesperelli, G.; Pumo, A.; Traversa, E.; Gusmano, G.; Bearzotti, A.; Montenero, A.; Gnappi, G. Sens. Actuators, B 1995, 25, 705-709.
22. Baraton, M. I.; Merhari, L. J. Eur. Ceram. Soc. 2004, 24, 1399-1404.
23. Qi, Q.; Zhang, T.; Wang, L. J. Appl. Phys. Lett. 2008, 93, 277-283.
24. Li, Z. Y.; Zhang, H. N.; Zheng, W.; Wang, W.; Huang, H. M.; Wang, C.; MacDiarmid, A. G.; Wei, Y. J. Am. Chem. Soc. 2008, 130, 5036-5037.
25. Kuang, Q.; Lao, C. S.; Wang, Z. L.; Xie, Z. X.; Zheng, L. S. J. Am. Chem. Soc. 2007, 129, 6070-6071.
26. Wu, R. J.; Sun, Y. L.; Lin, C. C.; Chen, H. W.; Chavali, M. Sens. Actuators, B 2006, 115, 198-204.
27. Zhang, Y. S.; Yu, K.; Jiang, D. S.; Zhu, Z. Q.; Geng, H. R.; Luo, L. Q. Appl. Surf. Sci. 2005, 242, 212-217.
28. Wang, X. H.; Zhang, J.; Zhu, Z. Q.; Zhu, J. Z. Appl. Surf. Sci. 2007, 253, 3168-3173.
29. Krishnakumar, T.; Jayaprakash, R.; Singh, V.N.; Mehta, B.R.; Phani, A.R. J. Nano Res. 2009, 4, 91-101.
30. Chou, K.-S.; Lee, T.-K.; Liu, F.-J. Sens. Actuators, B 1999, 56, 106-111.
31. Radeva, E. I.; Martev, I. N.; Dechev, D. A.; Ivanov, N.; Tsaneva, V. N.; Barber, Z. H. Surf. Coat. Technol. 2006, 201, 2226-2229.
32. Lee, E. T.; Jang, G.E.; Kim, C.K.; Yoon, D.H. Sens. Actuators, B 2001, 77, 221-227.
33. Steele, J. J.; Fitzpatrick, G. A.; Brett, M. J. IEEE Sens. J. 2007, 7, 955-956.
34. Auld, B. A.; Wilson, D. A.; Winslow, D. K.; Young, E. Appl. Phys. Lett. 1971, 18, 339-341.
35. Hemphill, R. B. Effect of a Thin-Film Phase-Transition Material on Surface Acoustic Wave Propagation. In IEEE 1984 Ultrasonics Symposium Proceedings; IEEE: New York, 1984; pp 1006-1010.
36. Hemphill, R. B. Attenuation of Acoustic Waves on a Piezoelectric Coated with Thin Metal Films. In 1972 Ultrasonics Symposium Proceedings; IEEE: Boston, 1972; pp 340-342.
37. Wu, T. T.; Chen, Y. Y.; Chou, T. H. J. Phys. D 2008, 41, 3231-3235.
38. Chen, Y. T.; Kao, H. L. Electron. Lett. 2006, 42, 948-950.
39. Penza, M.; Cassano, G. Sens. Actuators, B 2000, 68, 300-306.
40. Penza, M.; Anisimkin, V. I. Sens. Actuators B: Chem. 1999, 76, 162-166.