Hydrogen stability in hydrogenated amorphous carbon films with polymer-like and diamond-like structure

Journal of Applied Physics

Volumn 112, Issue 9, 2012, Pages

  Buijnsters, J G ^a   Gago, R ^b   Redondo Cubero, A ^c   Jimenez I ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

A-C:H FILMS; AROMATIC CLUSTERS; AS-GROWN; C-H BOND; DIAMOND-LIKE; DIFFERENT STRUCTURE; ELASTIC RECOIL DETECTION ANALYSIS; FILM MATRIX; FINE STRUCTURES; GRAPHITIZATION PROCESS; H-BONDING; H-CONTENT; HYDROGENATED AMORPHOUS CARBON (A-C:H); HYDROGENATED AMORPHOUS CARBON FILMS; LOSS RATES; NEAR SURFACE REGIONS; RADIATION-INDUCED; STRUCTURAL EVOLUTION; SURFACE DECOMPOSITION; THERMAL-ANNEALING; THICKNESS REDUCTION; X-RAY ABSORPTION NEAR EDGE SPECTROSCOPY; XANES;

ANNEALING; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; HYDROGEN; ION BOMBARDMENT;

POLYMER FILMS;

EID: 84870858520     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4764001     Document Type: Article

References (43)

1. T. C. Arnoldussen and E. M. Rossi, Ann. Rev. Mater. Sci. 15, 379 (1985). 10.1146/annurev.ms.15.080185.002115
2. J. Robertson, Mater. Sci. Eng. R. 37, 129 (2002). 10.1016/S0927-796X(02) 00005-0
3. R. Hauert and U. Müller, Diamond Relat. Mater. 12, 171 (2003). 10.1016/S0925-9635(03)00019-0
4. C. Casiraghi, A. C. Ferrari, and J. Robertson, Phys. Rev. B 72, 085401 (2005). 10.1103/PhysRevB.72.085401
5. A. Erdemir, M. Switala, R. Wei, and P. Wilbur, Surf. Coat. Technol. 50, 17 (1991). 10.1016/0257-8972(91)90187-2
6. A. Erdemir and C. Donnet, J. Phys. D: Appl. Phys. 39, R311 (2006). 10.1088/0022-3727/39/18/R01
7. C. Hopf, W. Jacob, and A. von Keudell, J. Appl. Phys. 97, 094904 (2005). 10.1063/1.1883729
8. I. Ahmad, S. S. Roy, P. D. Maguire, P. Papakonstantinou, and J. A. McLaughlin, Thin Solid Films 482, 45 (2005). 10.1016/j.tsf.2004.11.158
9. M. Moseler, P. Gumbsch, C. Casiraghi, A. C. Ferrari, and J. Robertson, Science 309, 1545 (2005). 10.1126/science.1114577
10. J. G. Buijnsters, M. Camero, and L. Vázquez, Phys. Rev. B 74, 155417 (2006). 10.1103/PhysRevB.74.155417
11. S. Peter, M. Günther, and F. Richter, Vacuum 86, 667 (2012). 10.1016/j.vacuum.2011.07.037
12. V. Liechtenstein, V. Jaggi, E. Olshanki, J. A. Scheer, P. Wurz, and S. K. Zeisler, Nucl. Instrum. Meth. Phys. Res. A 613, 429 (2010). 10.1016/j.nima.2009.09.093
13. R. Kalish, Y. Lifshitz, K. Nugent, and S. Prawer, Appl. Phys. Lett. 74, 2936 (1999). 10.1063/1.123971
14. S. Takabayashi, K. Okamoto, H. Sakaue, T. Takahagi, K. Shimada, and T. Nakatani, J. Appl. Phys. 104, 043512 (2008). 10.1063/1.2969792
15. C. Louro, C. Wagner Moura, N. Carvalho, M. Stueber, and A. Cavaleiro, Diamond Relat. Mater. 20, 57 (2011). 10.1016/j.diamond.2010.11.010
16. W. S. Choi and B. Y. Hong, Renewable Energy 33, 226 (2008). 10.1016/j.renene.2007.05.022
17. R. L. C. Wu, K. Miyoshi, R. Vuppuladhadium, and H. E. Jackson, Surf. Coat. Technol. 54-55, 576 (1992). 10.1016/S0257-8972(07)80085-5
18. D. R. Tallant, J. E. Parmeter, M. P. Siegal, and R. L. Simpson, Diamond Relat. Mater. 4, 191 (1995). 10.1016/0925-9635(94)00243-6
19. J. K. Walters, D. M. Fox, T. M. Burke, O. D. Weedon, R. J. Newport, and W. S. Howells, J. Chem. Phys. 101, 4288 (1994). 10.1063/1.468427
20. C. Wild and P. Koidl, Appl. Phys. Lett. 51, 1506 (1987). 10.1063/1.98617
21. V. G. Ralchenko, E. N. Loubnin, A. V. Popov, and V. E. Strelnitsky, Diamond Relat. Mater. 1, 345 (1992). 10.1016/0925-9635(92)90055-S
22. K. W. Gerstenberg and M. Grischke, J. Appl. Phys. 69, 736 (1991). 10.1063/1.347359
23. J. Stöhr, NEXAFS Spectroscopy (Springer-Verlag, New York, 1992).
24. J. G. Buijnsters, R. Gago, I. Jiménez, M. Camero, F. Agulló-Rueda, and C. Gómez-Aleixandre, J. Appl. Phys. 105, 093510 (2009). 10.1063/1.3103326
25. J. G. Buijnsters, M. Camero, R. Gago, A. R. Landa-Canovas, C. Gómez-Aleixandre, and I. Jiménez, Appl. Phys. Lett. 92, 141920 (2008). 10.1063/1.2903502
26. J. G. Buijnsters, M. Camero, L. Vázquez, F. Agulló-Rueda, R. Gago, I. Jiménez, C. Gómez-Aleixandre, and J. M. Albella, Diamond Relat. Mater. 19, 1093 (2010). 10.1016/j.diamond.2010.03.017
27. J. G. Buijnsters, M. Camero, L. Vázquez, F. Agulló-Rueda, C. Gómez-Aleixandre, and J. M. Albella, Vacuum 81, 1412 (2007). 10.1016/j.vacuum.2007.04.021
28. J. G. Buijnsters and L. Vázquez, Surf. Coat. Technol. 201, 8950 (2007). 10.1016/j.surfcoat.2007.03.055
29. M. Mayer, SIMNRA Users Guide, IPP Report 9/113 (Max Planck Institute, Garching, Germany, 1997).
30. V. Quillet, F. Abel, and M. Schott, Nucl. Instrum. Meth. B 83, 47 (1993). 10.1016/0168-583X(93)95906-L
31. A. Schenk, B. Winter, J. Biener, C. Lutterloh, U. A. Schubert, and J. Küppers, J. Appl. Phys. 77, 2462 (1995). 10.1063/1.358774
32. V. Kulikovsky, V. Vorlíček, P. Bohác, A. Kurdyumov, and L. Jastrabík, Thin Solid Films 447-448, 223 (2004). 10.1016/S0040-6090(03)01060-5
33. M. E. Adel, O. Amir, R. Kalish, and L. C. Feldman, J. Appl. Phys. 66, 3248 (1989). 10.1063/1.344116
34. T. Som, M. Malhotra, V. N. Kulkarni, and S. Kumar, Phys. B 355, 72 (2005). 10.1016/j.physb.2004.10.024
35. R. Gago, I. Jiménez, J. M. Albella, A. Climent-Font, D. Cáceres, I. Vergara, J. C. Banks, B. L. Doyle, and L. J. Terminello, J. Appl. Phys. 87, 8174 (2000). 10.1063/1.373514
36. R. Gago, M. Vinnichenko, H. U. Jäger, A. Yu. Belov, I. Jiménez, N. Huang, H. Sun, and M. F. Maitz, Phys. Rev. B 72, 14120 (2005). 10.1103/PhysRevB.72.014120
37. I. Jiménez, R. Gago, and J. M. Albella, Diamond Relat. Mater. 12, 110 (2003). 10.1016/S0925-9635(03)00011-6
38. J. Diaz, O. R. Monteiro, and Z. Hussain, Phys. Rev. B 76, 094201 (2007). 10.1103/PhysRevB.76.094201
39. Y. Wang, Y. Zou, T. Araki, J. Lüuning, A. L. D. Kilcoyne, J. Sokolov, H. Ade, and M. Rafailovich, Macromolecules 43, 8153 (2010). 10.1021/ma101213h
40. J. Robertson and E. P. OReilly, Phys. Rev. B 35, 2946 (1987). 10.1103/PhysRevB.35.2946
41. R. Gago, I. Jiménez, and J. M. Albella, Surf. Sci. 482, 530 (2001). 10.1016/S0039-6028(01)00939-6
42. C. Kolczewski, R. Püttner, M. Martins, A. S. Schlachter, G. Snell, M. M. SantAnna, K. Hermann, and G. Kaindl, J. Chem. Phys. 124, 034302 (2006). 10.1063/1.2139674
43. A. Schöll, R. Fink, E. Umbach, G. E. Mitchell, S. G. Urquhart, and H. Ade, Chem. Phys. Lett. 370, 834 (2003). 10.1016/S0009-2614(03)00215-X