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Volumn 447-448, Issue , 2004, Pages 223-230

Interaction of oxygen with a-C:H, a-C films and other carbon materials

Author keywords

A COx film; IR spectra; Raman spectra

Indexed keywords

ANNEALING; CARBON DIOXIDE; DIAMOND LIKE CARBON FILMS; ELECTRON DIFFRACTION; HYDROGENATION; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; OXYGEN; RAMAN SPECTROSCOPY;

EID: 1342302475     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01060-5     Document Type: Conference Paper
Times cited : (15)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.