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Volumn 447-448, Issue , 2004, Pages 223-230
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Interaction of oxygen with a-C:H, a-C films and other carbon materials
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Author keywords
A COx film; IR spectra; Raman spectra
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Indexed keywords
ANNEALING;
CARBON DIOXIDE;
DIAMOND LIKE CARBON FILMS;
ELECTRON DIFFRACTION;
HYDROGENATION;
INFRARED SPECTROSCOPY;
ION BOMBARDMENT;
MAGNETRON SPUTTERING;
OXYGEN;
RAMAN SPECTROSCOPY;
A-COX FILMS;
IR SPECTRA;
AMORPHOUS FILMS;
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EID: 1342302475
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(03)01060-5 Document Type: Conference Paper |
Times cited : (15)
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References (20)
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