Dry lithography of large-area, thin-film organic semiconductors using frozen CO2 resists

Advanced Materials

Volumn 24, Issue 46, 2012, Pages 6136-6140

  Bahlke, Matthias E ^a   Mendoza, Hiroshi A ^a   Ashall, Daniel T ^b   Yin, Allen S ^a   Baldo, Marc A ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

^b BANGOR UNIVERSITY   (United Kingdom)

Author keywords

lithography; OLED; organic; patterning; semiconductors

Indexed keywords

DRY LITHOGRAPHY; OLED; ORGANIC; PATTERNING; ROOM TEMPERATURE; SHADOW MASK; THIN-FILM DEPOSITIONS;

LITHOGRAPHY; PHOTOLITHOGRAPHY; PIXELS; SEMICONDUCTOR MATERIALS;

CARBON DIOXIDE;

CARBON DIOXIDE; COORDINATION COMPOUND; INDIUM TIN OXIDE; IRIDIUM; TIN DERIVATIVE;

ARTICLE; CHEMISTRY; FREEZING; QUANTUM THEORY; SEMICONDUCTOR; TEMPERATURE;

CARBON DIOXIDE; COORDINATION COMPLEXES; FREEZING; IRIDIUM; QUANTUM THEORY; SEMICONDUCTORS; TEMPERATURE; TIN COMPOUNDS;

EID: 84870537678     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201202446     Document Type: Article

References (32)

1. K. Chung, N. Kim, J. Choi, C. Chu, J. Huh, SID Symposium Digest of Technical Papers 2006, 37, 1958.
2. H. D. Kim, J. K. Jeong, H.-J. Chung, Y.-G. Mo, SID Symposium Digest of Technical Papers 2008, 39, 291.
3. J.-J. Lih, C.-I. Chao, C.-C. Lee, J. Soc. Information Display 2007, 15, 3.
4. J. Chen, V. Leblanc, S. H. Kang, P. J. Benning, D. Schut, M. A. Baldo, M. A. Schmidt, V. BuloviÄ, Adv. Funct. Mater. 2007, 17, 2722.
5. M. A. Baldo, V. G. Kozlov, P. E. Burrows, S. R. Forrest, V. S. Ban, B. Koene, M. E. Thompson, Appl. Phys. Lett. 1997, 71, 3033.
6. M. Shtein, P. Peumans, J. B. Benziger, S. R. Forrest, J. Appl. Phys. 2003, 93, 4005.
7. T. R. Hebner, C. C. Wu, D. Marcy, M. H. Lu, J. C. Sturm, Appl. Phys. Lett. 1998, 72, 519.
8. D. M. Karnakis, T. Lippert, N. Ichinose, S. Kawanishi, H. Fukumura, Appl. Surf. Sci. 1998, 127-129, 781.
9. J. Y. Lee, S. T. Lee, Adv. Mater. 2004, 16, 51.
10. J.-K. Lee, M. Chatzichristidi, A. A. Zakhidov, P. G. Taylor, J. A. DeFranco, H. S. Hwang, H. H. Fong, A. B. Holmes, G. G. Malliaras, C. K. Ober, J. Am. Chem. Soc. 2008, 130, 11564.
11. A. A. Zakhidov, J.-K. Lee, H. H. Fong, J. A. DeFranco, M. Chatzichristidi, P. G. Taylor, C. K. Ober, G. G. Malliaras, Adv. Mater. 2008, 20, 3481.
12. A. A. Zakhidov, J.-K. Lee, J. A. DeFranco, H. H. Fong, P. G. Taylor, M. Chatzichristidi, C. K. Ober, G. G. Malliaras, Chem. Sci. 2011, 2, 1178.
13. C. D. Müller, A. Falcou, N. Reckefuss, M. Rojahn, V. Wiederhirn, P. Rudati, H. Frohne, O. Nuyken, H. Becker, K. Meerholz, Nature 2003, 421, 829.
14. J. A. DeFranco, B. S. Schmidt, M. Lipson, G. G. Malliaras, Org. Electronics 2006, 7, 22.
15. H. S. Hwang, A. A. Zakhidov, J.-K. Lee, X. André, J. A. DeFranco, H. H. Fong, A. B. Holmes, G. G. Malliaras, C. K. Ober, J. Mater. Chem. 2008, 18, 3087.
16. J. Cuomo, C. Guarnieri, K. Saenger, D. Yee, IBM Technical Disclosure Bulletin 1992, 35.
17. W. Johnson, R. Laibowitz, C. Tsuei, IBM Technical Disclosure Bulletin 1978, 20.
18. G. M. King, G. Schürmann, D. Branton, J. A. Golovchenko, Nano Lett. 2005, 5, 1157.
19. A. Han, D. Vlassarev, J. Wang, J. A. Golovchenko, D. Branton, Nano Lett. 2010, 10, 5056.
20. A. Han, A. Kuan, J. Golovchenko, D. Branton, Nano Lett. 2012, 12, 1018.
21. H. Yamamoto, J. Brooks, M. S. Weaver, J. J. Brown, T. Murakami, H. Murata, Appl. Phys. Lett. 2011, 99, 033301.
22. T. Ikeda, H. Murata, Y. Kinoshita, J. Shike, Y. Ikeda, M. Kitano, Chem. Phys. Lett. 2006, 426, 111.
23. J. P. Martin Trusler, J. Phys. Chem. Ref. Data 2011, 40, 043105.
24. W. Wagner, A. Saul, A. Pruss, J. Phys. Chem. Ref. Data 1994, 23, 515.
25. P. A. Gerakines, W. A. Schutte, J. M. Greenberg, E. F. van Dishoeck, arXiv:astro-ph/9409076 1994.
26. M. Á. Satorre, M. Domingo, C. Millán, R. Luna, R. Vilaplana, C. Santonja, Planetary Space Sci. 2008, 56, 1748.
27. A. Han, J. Chervinsky, D. Branton, J. A. Golovchenko, Rev. Sci. Instruments 2011, 82, 065110.
28. G. B. Hansen, J. Geophys. Res. 1997, 102, 569.
29. A. Murarka, C. Packard, F. Yaul, J. Lang, V. Bulovic, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, 292-295.
30. M. Domingo, C. Millán, M. A. Satorre, J. Cantó, SPIE 2007, 66164A.
31. K. E. Tempelmeyer, D. W. Mills, J. Appl. Phys. 1968, 39, 2968.
32. F. W. Sears, An Introduction to Thermodynamics: The Kinetic Theory of Gases, and Statistical Mechanics, Addison-Wesley Pub. Co., Reading, MA 1953.