Micro-contact printed MEMS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 292-295

  Murarka, Apoorva ^a   Packard, Corinne ^b   Yaul, Frank ^a   Lang, Jeffrey ^a   Bulovic, Vladimir ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Department of Metallurgical and Materials Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AL FILMS; CHEMICAL TREATMENTS; DEFORMABLE MIRRORS; DELETERIOUS EFFECTS; ELEVATED TEMPERATURE; FLEXIBLE POLYMERIC SUBSTRATES; LARGE AREA ARRAYS; MEMS FABRICATION; MEMS SENSORS; MICRO CONTACT PRINTING; MICRO-CONTACT; OPTICAL CAVITIES; WET-PROCESSING;

FABRICATION; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING; SENSORS;

MEMS;

EID: 79953802095     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734419     Document Type: Conference Paper

References (5)

1. C. Packard, A. Murarka, E.W. Lam, M.A. Schmidt, V. Buloví, "Contact-Printed Microelectromechanical Systems", Advanced Materials, 22, pp. 1840-1844, 2010.
2. W. P. Liu, G. H. Brodie, "A demonstration of MEMS-based active turbulence transitioning", Int. J. Heat Fluid Flow, 21, pp. 297-303, 2000. (Pubitemid 30416667)
3. M. A. Meitl, Z. T. Zhu, V. Kumar, K. J. Lee, X. Feng, Y. Y. Huang, I. Adesida, R. G. Nuzzo, J. A. Rogers, "Transfer printing by kinetic control of adhesion to an elastomeric stamp", Nature Materials, 5, pp. 33-38, 2006. (Pubitemid 43049385)
4. X. Feng, M. A. Meitl, A. M. Bowen, Y. Huang, R. G. Nuzzo, J. A. Rogers, "Competing Fracture in Kinetically Controlled Transfer Printing", Langmuir, 23, pp. 12555-12560, 2007. (Pubitemid 350275573)
5. J. P. Conde, J. Gaspar, V. Chu, "Low-temperature thin film silicon MEMS", Thin Solid Films, 427, pp. 181-186, 2003.